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PECVD Trend Chart July-2018.

Published byJody Burke Modified over 6 years ago

Presentation on theme: "PECVD Trend Chart July-2018."— Presentation transcript:

1 PECVD Trend Chart July-2018

2 PECVD Trend Chart - July 2018

3 PECVD Trend Chart - July 2018

4 PECVD Trend Chart - July-2018
Oct 2017, Monitored using newly prepared BOE Etchant

5 PECVD Trend Chart - July 2018
Started from October 2017 Stress is found to be compressive.

6 PECVD Trend Chart - July 2018
SiN -SiH4+NH3 20W HF power & 20W LF power

7 PECVD Trend Chart - July 2018
SiN SiH4+NH3 20W HF power & 20W LF power

8 PECVD Trend Chart - July 2018
SiN SiH4+NH3 20W HF power & 20W LF power

9 PECVD Trend Chart - July 2018
SiN SiH4+NH3 20W HF power & 20W LF power

10 PECVD Trend Chart - July 2018
SiN low refractive index SiH4+NH3 20W HF power & 20W LF power: Ratio of SiH4:NH3 is 1:2

11 PECVD Trend Chart - July 2018
SiN low refractive index SiH4+NH3 20W HF power & 20W LF power: Ratio of SiH4:NH3 is 1:2

12 PECVD Trend Chart - July 2018
SiN low refractive index SiH4+NH3 20W HF power & 20W LF power: Ratio of SiH4:NH3 is 1:2

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