1. Quartz Liner Upgrade
In 200 Series ICP tools

2. Retractable quartz liner
11/22/2018
High versatility and uptime for 200 Series ICP tools
Fast plasma cleaning and low particle generation in ICP-CVD
Hot reactor walls – up to 250°C – for no process cross-contamination
Easy and fast manual cleaning for harsh ICP-RIE processes
Quartz Liner

3. ICP reactor preparation
Liner mounting
11/22/2018
Operation Sequence
ICP reactor preparation
Quartz Liner

4. Mounting inside reactor
Liner mounting
11/22/2018
Operation Sequence
Mounting inside reactor
Quartz Liner

5. EASY LINER replacement by a single person
Liner mounting
11/22/2018
Timing
1 min
Reactor Venting
4 min
Pumping down to 10-4 Tor
5 min
Liner replacement
Plasma cleaning
EASY LINER replacement by a single person
Quartz Liner

6. Drie of hard materials DRIE of SiC DRIE of glass DRIE of sapphire
11/22/2018
DRIE of SiC
DRIE of glass
DRIE of sapphire
DRIE of quartz
Quartz Liner

7. Small feature Si etching
Drie of silicon
11/22/2018
Si etching 40 µm deep
Si etching 60 µm deep
Si etching 250 µm deep
Small feature Si etching
(AR 1:15)
Quartz Liner

8. Retractable quartz liner
11/22/2018
High versatility and uptime for 200 Series ICP tools
Fast plasma cleaning and low particle generation in ICP-CVD
Hot reactor walls – up to 250°C – for no process cross-contamination
Easy and fast manual cleaning for harsh ICP-RIE processes
Quartz Liner