1. MEMS TECHNOLOGY

2. INTRODUCTION MEMS: micro-electro-mechanical systems
Combination of mechanical functions (sensing,moving,heating) and electrical functions (switching ,deciding) on the same chip using micro fabrication technology.

3. MEMS PROCESS
PowerPoint
Same as the process steps used for making conventional electronic circuits

4. FABRICATION PROCESS:

5. DEPOSITION: CHEMICAL DEPOSITION Chemical vapour deposition
PHYSICAL DEPOSITION
Sputtering

6. LITHIOGRAPHY:
Application of photo resist
Optical exposure to print an image of the mask onto the resist
Immersion in an aqueous developer solution to dissolve the exposed resist

7. ETCHING:
DRY ETCHING
WET ETCHING

8. MATERIALS FOR MEMS:
Materials are the basic things required to develop micro sensors
Metals
Polymers
Ceramic materials
Semiconductors
Composite materials

9. MICRO MACHINING TECHNOLOGY:
Process of shaping silicon or other materials to realise 3-D mechanical in miniature form and the mechanical devices that are compatible with the micro electronic devices

10. TYPES OF MICROMACHINING:
BULK micromachining:
SURFACE micromachining:
LIGA process:

11. MEMS ACCELEROMETRER: CONVENTIONAL ACCELEROMETER SENSOR
Made of bulky and heavy metal parts
Require high operating voltage/current
Needs careful maintenance
Highly expensive not throwaway type

12. PIEZO-RESISTIVE ACCELEROMETER:

13. LAYOUT OF THE RESISTOR:

14. MASKS that are used 4 ACCELEROMETER:

15. FABRICATION PROCESS:

16. Contd….

17. INTERFACE ELECTRONIC CKT

18. MEMS ACCELEROMETER

19. ADVANTAGES: Significantly lower manufacturing costs
Small inertial mass
Particularly realized in the area of:
– sensors
– signal switching

20. TECHNICAL LIMITATIONS:
Imprecise fabrication methods
Expensive and complex packaging
CAD Design tool inaccuracies

21. APPLICATIONS:
Accelerometers in consumer electronics devices such as game controllers
Communications
biotechnology

22. FUTURE:
As with all emerging technologies, the MEMS industry had been predicted to revolutionize technology and our lives.
It has the potential to change our daily life as much as computer