1. NA Gases Committee Liaison Report
SEMICON Japan
December 2008

2. Leadership
Chairman
Tim Volin / Parker Hannifin

3. Gases Committee C: Tim Volin – Parker Hannifin
Components SC
Gary Frank - Consultant
Contamination SC
Jim McAndrew - Air Liq
Keith Kerwin - TI
Materials & Process SC
Tim Volin – Parker Hann.
Filters & Purifiers TF
Troy Scoggins – Entegris
Biswanath Roy - PALL
Materials of
Construction Gas Delivery
Systems TF
Craig Burton – Valex
Tim Volin – Parker Hann.
Mass Flow TF
Gary Frank – Consultant
Pressure Measurement TF
Emir Vukotic – AMAT
Heater Jacket TF (new)
David Colquhoun–BriskHeat

4. Meeting Information Last meeting Next meeting
Tuesday, Nov 4, 2008, NA Fall Meetings, San Jose, CA
Next meeting
Tuesday, March 31, 2009, NA Spring Meetings, Vancouver, Canada

5. New SNARF
New Standard: Guide for Heater Jacket for Use in Semiconductor
Revision of SEMI E Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers
Revision of SEMI F Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
Reapproval of SEMI E Test Method for Determining Particle Contribution by Mass Flow Controllers
Reapproval of SEMI E Test Method for Determining Reliability of Mass Flow Controller
Reapproval of SEMI F Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components

6. Ballot Results Summary [1/3]
Ballot Passed Technical Committee Review
Doc. 4582, Revision of E Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers
Doc. 4601A, Reapproval of C14-95 (Reapproved 1102) - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
Doc. 4623, Revision of F , Test Method For Scanning Electron Microscopy (SEM) Evaluation Of Wetted Surface Condition Of Stainless Steel Components
Doc. 4630, Reapproval of E (Reapproved 1103) - Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers
Doc. 4631, Reapproval of E (Reapproved 1103) - Test Method for Determining Warm-Up Time of Mass Flow Controllers

7. Ballot Results Summary [2/3]
Ballot Passed Technical Committee Review
Doc. 4632, Revision of E Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
Doc. 4633, Reapproval of E Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
Doc. 4636, Revision of SEMI F Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components
Doc. 4655, Revision of C (Reapproved 0999) Standard Specification for Helium (He), In Cylinders, % QUALITY
Doc. 4656, Revision of C Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% QUALITY

8. Ballot Results Summary [3/3]
Ballot Failed Technical Committee Review
Doc. 4657, New Standard: Specifications and Guidelines for Tungsten Hexafluoride (WF6)(Subj: combining C3.26 and C3.52)

9. Upcoming Ballots [1/2] Technical Ballot for Cycle 1&2 ’09
Doc. 4657A, New Standard: Specifications and Guidelines for Tungsten Hexafluoride (WF6)
Doc. 4680, Rev. to E , Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
Doc. 4677, Reapproval of E Test Method for Determining Particle Contribution by Mass Flow Controllers
Doc. 4678, Reapproval of E Test Method for Determining Reliability of Mass Flow Controller

10. Upcoming Ballots [2/2] Technical Ballot for Cycle 1&2 ’09
Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems
Revision of SEMI F Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves
Reapproval of SEMI F Guideline for Gas Compatibility with Silicon Used in Gas Distribution Components
Reapproval of Gases standards (C3.12,C3.27 ,etc)

11. Components Subcommittee
Mass Flow Controller TF/Gary Frank (Consultant)
Revising E , Practice For Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers - ongoing
New gas code is frequently requested
Submitting 5 year reapproval of Mass Flow Controller standards
SEMI E , SEMI E

12. Components Subcommittee
Pressure Measurement TF/Emir Vukotic (AMAT)
Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems, failed and was sent back for rework
Doc will be reballoted and reviewed early next year, Spring 2009

13. Contamination Subcommittee
Filters & Purifiers TF/Troy Scoggins (Entegris), Biswanath Roy (Pall)
Reviewing 5 year standards
F Test Method for Determination of Particle Contribution of Gas Delivery System – to be submitted next meeting
F Start-up And Verification Of Purifier Performance Testing For Trace Gas Impurities And Particles At An Installation Site – Still reviewing
F Classification of Airborne Molecular Contaminant Levels in Clean Environments – Still reviewing

14. Materials & Processes Subc
Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin)
Submitting 5 year review standards
SEMI F Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components – Passed
SEMI F Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components – Passed
Discussing new document for welding and joining processes

15. Materials & Processes Subc
Heater Jacket TF/David Colquhoun (BriskHeat) (new)
Was recently formed at Fall meeting
Demand for higher performance jacketing heater systems in the semiconductor
manufacturing sector is beginning to require standardization due numerous issues impacting the customer/user base and the manufacturers of heater systems for the semiconductor equipment industry.