1. Fan L-S, Tai Y-C and R S Muller 1988
Integrated moveable micromechanical structures for sensors and actuators
IEEE Trans. Electron Devices
These motors inspired Karen Marcus at MCNC to create the
polyMUMPS process, which first ran commercially in 1992.
Zettl group

2. POLY0
DIMPLE
POLY1
ANCHOR1

6. MicroOptical Bench (Ming Wu, UCLA)

8. http://www. mie. utoronto

9. Tang, Nguyen, Howe Comb-drive resonator
Great for education
Electrostatic sensing & actuation
Beam theory
damping

10. Issus, 400g acceleration, geared rear legs