1. News from CMS Process Quality Control
Thomas Bergauer
HEPHY Vienna
CMS TK Week, , CERN

2. Jean-Charles Fontaine
Centers
Three Process Qualification Centers:
Florence
Anna Macchiolo
Carlo Civinini
Mirko Brianzi
Strasbourg
Jean-Charles Fontaine
Jean-Marie Helleboid
Jean-Laurent Agram
Vienna
Thomas Bergauer
Margit Oberegger
Characterization by QTC
Process stability on test structures
with 9 different measurements
Thomas Bergauer, HEPHY Vienna

3. CVmos at different temperatures
Just a test (Vienna coolingbox was available)
CVmos at 5 different temperatures
CVmos chosen because it is the simplest measurement
No temperature dependence of Vfb
Thomas Bergauer, HEPHY Vienna

4. Thomas Bergauer, HEPHY Vienna
Thicker Aluminium
39 Teststructures from PQC Florence
Perugia 12 (prod.week 34/02)
Perugia 13 (03/02)
Perugia 14 (06/02 and 23/02)
Pisa 59 (08/02)
Pisa 60 (24/02)
Influence to rho_Alu
after
Before week 20/02
Average data:
before Week 20/02:
26,09mOhms/sq.
After week 20/02:
14,34mOhms/sq.
Also: slightly lower C_ac value:
17,01pF (before week 20/02) ->
16,65pF (after)
Thomas Bergauer, HEPHY Vienna

5. Thomas Bergauer, HEPHY Vienna
Mask Problem W7B
Misalignment of 3 structures at the standard half moon
Not able to contact with probecard in one cycle
W7B: 1440 pcs.
Cac R (Al, p+, poly) Ivgcd Cint IVbaby Rint CVdiode CVMOS
& IV diel
Thomas Bergauer, HEPHY Vienna

6. Thomas Bergauer, HEPHY Vienna
Mask Problem W7B
3 structures on the standard half moon affected
Sensor mask is OK
Options:
new probecard design OR
new wafer mask design
GCD
C_int
Thomas Bergauer, HEPHY Vienna

7. Thomas Bergauer, HEPHY Vienna
Inter-calibration
Circulation of 5 Teststructures
Vienna -> Strasbourg
Strasbourg -> Florence
Florence -> Vienna
-> Florence
-> Vienna
-> Strasbourg
(Exchange of TS during this Tracker Week)
Results: (up to now)
Good agreement in all measurements
Higher Leakage current of Vienna Probecard causes lower R_int and higher IV_dielectric and GCD problems (fit)
small differences in capacitances values caused by stray capacitances. (<1pF)
Thomas Bergauer, HEPHY Vienna

8. Thomas Bergauer, HEPHY Vienna
Software
New Software allows re-read of local files
Up to now: Stand-alone program
Re-analyze
Re-write XML file
Acquisition
Analysis
DB Interface
Main:
Local files
Analysis
DB Interface
new:
Future:
Fully integrated into acquisition software
Acquisition
Analysis
DB Interface
Local files
Thomas Bergauer, HEPHY Vienna

9. Thomas Bergauer, HEPHY Vienna
Database
322 teststructures successfully loaded into db
61 faulty
(status: )
Thomas Bergauer, HEPHY Vienna