1. NA Facilities and Gases Committees Liaison Report
Updated March 09, 2011

2. Gases Co-chair
Tim Volin - Parker Hannifin

3. Phil Naughton - Applied Materials
Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied Materials

4. Gases Committee C: Tim Volin – Parker Hannifin
Components SC
TBD
Contamination SC
Tim Volin – Parker Hann.
Materials & Process SC
Tim Volin – Parker Hann.
Mass Flow TF
Mohamed Saleem - Fujikin
John Savadkouhi – Brooks
Instrument
Filters & Purifiers TF
Mohamed Saleem – Fujikin
Materials of
Construction Gas Delivery
Systems TF
Tim Volin – Parker Hann.
Pressure Measurement TF
Justin Hough - AMAT
Heater Jacket TF
David Colquhoun – BriskHeat

5. Design for Facilities TF
Facilities Committee
C: Phil Naughton – Applied Materials
C: Steve Lewis – CH2M Hill
F47 Revision TF (New)
Ken Kapur – KLA Tencor
Uwe Haller – Applied Materials
Phil Sarikas – Intel
Todd Steudtner – TI
Alex McEachern - PSL
F51 Revision TF (New)
Dalia Vernikovsky - Applied Seals
Design for Facilities TF
Al Chasey – Arizona State Univ.

6. Meeting Information Last meeting Next meeting
Tuesday, November 9, NA Fall
SEMI HQ, San Jose, CA
Next meeting
Tuesday, March 29, 2011, NA Spring Standards Meeting
SEMI HQ in San Jose, CA
for the latest update

7. Ballot Results Summary
Ballot Passed Technical Committee Review [1]
Doc. 5055, Reapproval of SEMI C Specifications and Guidelines for Oxygen
Doc. 5056, Reapproval of SEMI C Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
Doc. 5057, Reapproval of SEMI C Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
Doc. 5058, Reapproval of SEMI C Specifications and Guidelines for Argon
Doc. 5059, Reapproval of SEMI C Specifications and Guidelines for Hydrogen
Doc. 5060, Reapproval of SEMI C Specifications and Guidelines for Nitrogen
Doc. 5061, Reapproval of SEMI C Specifications and Guidelines for Nitrous Oxide (N2O)

8. Ballot Passed Technical Committee Review [2]
Doc. 4786B, Revision of SEMI F4-1000, Specification for Pneumatically Actuated Cylinder Valves
Doc. 5044, Revision to SEMI F Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves
Doc. 4788A, Revision of SEMI F Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications (failed ISC Review)
Doc. 4789B, Revision of SEMI F Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications (failed ISC Review)

9. Ballot Passed Technical Committee Review [3]
Doc. 4722E - Revision of SEMI F , Test Method for Determination of Particle Contribution of Gas Delivery System (failed ISC Review)
Doc Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates (failed ISC Review)
Doc Revision of SEMI E18-91 (Reapproved 1104) with title change to Guide For Temperature Specifications Of The Mass Flow Controller
Doc Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters (failed ISC Review)

10. Ballot Failed Technical Committee Review
Doc. 4737A, New Standard: Guide For Heater Jacket Requirements

11. Upcoming Ballots [1/3] Technical Ballot for Cycle 1 and 2, 2011
Doc Revision of SEMI E Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers
Doc. 5677C - Revision of SEMI E , Test Method For Determining Particle Contribution By Mass Flow Controllers
Doc. 4737B - New Standard: Guide For Heater Jacket Requirements
Doc. 4788B - Revision of SEMI F Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications
Doc Reapproval of SEMI F E, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
Doc Reapproval of SEMI F Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

12. Upcoming Ballots [2/3]
Doc. 4789C, Revision of SEMI F Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications
Doc. 4722F- Revision of SEMI F , Test Method for Determination of Particle Contribution of Gas Delivery System
Doc. 4968A - Revision of SEMI E16-90 (Reapproved 1104) with title change to Guide For Determining And Describing Mass Flow Controller Leak Rates
Doc. 4970A - Revision of SEMI E27-92 (Reapproved 1104) with title change to Terminology For The Linearity Of Mass Flow Controllers And Mass Flow Meters
Doc Reapproval of SEMI F (Reapproved 1103) Test Method For Moisture Interaction And Content Of Gas Distribution Systems And Components By Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

13. Upcoming Ballots [3/3]
Document 4652A - Revision of SEMI C , Specification for Arsine (AsH3) in Cylinders, 99.94% Quality
Document 4657B - New Standard: Specifications for Tungsten Hexafluoride (WF6)
Document 4734A - New Standard: Specification and Guide for Boron Trichloride (BCl3)
Document Reapproval of SEMI F (Reapproved 1103), Test Method for Purge Efficacy of Gas Source System Panels
Document Reapproval of SEMI F (Reapproved 1104), Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
Document Reapproval of SEMI F (Reapproved 1104), Test Method for Efficiency Qualification of Point-of-Use Gas Filters

14. Components Subcommittee
Mass Flow TF/Mohamed Saleem (Fujikin)
Balloted 5 year revisions/approvals of Mass Flow Controller standards
E16-90 (Reapproved 1104) MFC Leak Rates
E27-92 (Reapproved 1104) Mass Flow Meter Linearity
E (Particle Contribution of MFC), reballot
E (Reliability of MFC), reballot
Drafting doc Revision of SEMI E Practice for Referencing Gases, Gas Mixtures and Vaporizable Materials Used in Digital Mass Flow Controllers
Adding two additional mixed gas codes

15. Components Subcommittee
Pressure Measurement TF/Justin Hough (Applied Materials)
Drafting
Doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems

16. Contamination Subcommittee
Filters & Purifiers TF/Mohamed Saleem (Fujikin)
Balloted Doc. 4722F - Revision of SEMI F , Test Method for Determination of Particle Contribution of Gas Delivery System

17. Materials & Processes Subc
Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin)
Balloted two documents for cycle
Doc. 4788B, Revision of F Practice For Gas Tungsten Arc (GTA) Welding Of Fluid Distribution Systems In Semiconductor Manufacturing Applications
Doc. 4789C, Revision of F Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications
Future work includes a new document for welding and joining processes currently not addressed by SEMI Standards

18. Materials & Processes Subc
Heater Jacket TF/David Colquhoun (BriskHeat)
Demand for higher performance jacketing heater systems in the semiconductor is needed
Consistent ways of specifying jacket is required
Doc. 4737A - New Standard: Guide For Heated Systems Requirements
Failed and returned to TF for rework
The document was balloted in cycle 2-11

19. Facilities Committee SEMI F47 Revision Task Force/Alex McEachern (PSL)
F47 is up for 5 year review.
F47 requires that tools be immune to voltage sags that commonly occur on AC power grids.
Rewriting doc. 5079, Revision of SEMI F Specification for Semiconductor Processing Equipment Voltage SAG Immunity

20. Facilities Committee [2]
SEMI F51 Revision Task Force/Dalia Vernikovsky (Applied Seals NA)
F51 is up for 5 year review
Drafting doc. 5080, Revision of SEMI F Guide for Elastometric Sealing Technology
A review of possibilities to ‘assign’ a code of possible levels of acceptance of what o-rings can be suited for ( a rating system ) was proposed
Meeting monthly
End user is encouraged to participate

21. Contact For more information, please contact
Kevin Nguyen at