1. Silicon Wafer NA TC Chapter Liaison Report
March 7, 2017

2. Meeting Information Last meeting Next meeting
Tuesday, July 12, 2016, SEMICON West
San Francisco Marriott Marquis, CA
Next meeting
Tuesday, April 4, 2017, NA Spring
KLA-Tencor, Milpitas, CA

3. Co-chairs
Noel Poduje /SMS
Dinesh Gupta /STA

4. Int’l Polished Wafer TF
Leadership Changes
Int’l Polished Wafer TF
Mike Goldstein stepped down
Int’l SOI TF
Bich-Yen Nguyen stepped down
Gerd Pfeiffer (GlobalFoundries) was appointed as the new leader

5. Silicon Wafer Committee C: Dinesh Gupta - STA C: Noel Poduje – SMS
Specifications
Int’l Annealed Wafers TF
Dinesh Gupta -STA
Int’l Epitaxial Wafers TF
Dinesh Gupta - STA
Int’l Polished Wafers TF
John Valley
Int’l SOI Wafers TF
Gerd Pfeiffer -GlobalFoundries
Metrology
Int’l Advanced Wafer
Geometry TF
Noel Poduje – SMS
Jaydeep Sinha – Consultant
Int’l Automated Advance Surface
Inspection TF
Kurt Haller - KLA-Tencor
Committee
Int’l Test Methods TF
Int’l Terminology TF
TBD

6. Int'l Test Methods Task Force
11/30/2018
New SNARFs
Int’l AWG TF
Doc. 5915, Line Item Revision to SEMI M1-0215, Addition to Related Information : Illustration of Flatness and Shape Metrics for Silicon Wafers
SNARF was revised
Doc. 6041, Line Item Revision to M Guide For Assigning Addresses To Rectangular Elements In A Cartesian Array
Int'l Test Methods Task Force
Reapproval and line item revision (title conformance)
MF1763, MF28, MF673, MF928, MF1982, MF728, MF978

7. Ballots authorization
11/30/2018
Ballots authorization
Cycle
6042, Line Item Revision to SEMI MF (Reapproved 1111)Test Methods for Measuring Contrast of a Linear Polarizer
6043, Line Item Revision to SEMI MF (Reapproved 0912) Test Methods for Minority Carrier Lifetime in Bulk Germanium and Silicon by Measurement of Photoconductivity Decay
6044, Line Item Revision to SEMI MF Test Methods For Measuring Resistivity Of Semiconductor Wafers Or Sheet Resistance Of Semiconductor Films With A Noncontact Eddy-current Gauge
6045, Line Item Revision to SEMI MF Test Methods For Edge Contour Of Circular
6046, Line Item Revision to SEMI MF Test Methods For Analyzing Organic Contaminants On Silicon Wafer Surfaces By Thermal Desorption Gas Chromatography
6047, Reapproval of SEMI MF (Reapproved 1111) Practice for Preparing an Optical Microscope for Dimensional Measurements
6048, Reapproval of SEMI MF (Reapproved 1111)Test Method for Characterizing Semiconductor Deep Levels by Transient Capacitance Techniques
These ballots were adjudicated at SEMICON Japan 2016 meeting.

8. Int’l Advanced Wafer Geometry TF
Leaders:
Noel Poduje (SMS) & Jaydeep Sinha (Consultant)
Presentations:
John Valley of SunEdison presented Advanced Wafer HVM Nanotopography Metrology
Dieter Mueller of KT presented Invalid Sector issue
Ballot development
Doc M1 (geometry parameters) revising by Japan
M21, M43 and M78 are due for 5 year review. Members are asked to review before issuing for reapproval ballots.

9. Int’l Automated Advance Surface Inspection TF
Leader:
Kurt Haller (KLA-Tencor)
Ballot development
Doc #5995, Line Item Revision of SEMI MF Test Method for Measuring Reflective Total Integrated Scatter
Ballot issued in cycle 6-16 for review at SEMICON Europa
Presentation
Joann Qiu, Intel, gave a talk entitled, “ASI Development Focus,”

10. Int’l Polished Wafer TF
Leader:
John Valley
Ballot development
Doc. 6019A, Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers
To address rejects in ¶R3-4.4 on minority carrier lifetime measurements in electronic silicon manufacture must be controlled by recombination at impurities
Improvement to figure 3 and 7

11. Int’l SOI Wafer TF Leader: Presentation:
Gerd Pfeiffer (GlobalFoundries)
Presentation:
Substrate requirement for Low power application (FD-SOI) by Gerd Pfeiffer

12. Ballot development: Leader:
Int’l Test Methods TF
Leader:
Dinesh Gupta (STA)
Ballot development:
Doc. 5703, New Standard: Guide for Carrier Recombination Lifetime Measurements in Electronic Grade Silicon
Maintaining 5 year review of SEMI MF documents.

13. Int’l Epitaxial Wafer TF
Leader:
Dinesh Gupta (STA)
Doc. 5989, Revision of SEMI M , Specifications for Silicon Epitaxial Wafers
Ballot was approved at SEMICON West
TF is on standby mode until new topic arises.

14. Int’l Terminology TF
Leader: TBD
GCS members held a meeting and suggested a plan to remove terms out of M59, Terminology for Silicon Technology, and place them back to their original standards when they are due for 5 year review

15. Kevin Nguyen at knguyen@semi.org
Question?
For more information, please contact
Kevin Nguyen at