1. Europe Gases & Liquid Chemicals Committee Report
October 2010

2. Leadership Committee Co-Chairs Non-Voting Co-Chair:
Jean-Marie Collard, Solvay Chemicals
Gordon Ferrier, Air Products
Non-Voting Co-Chair:
Gummaar De Vos, FujiFilm Electronic Materials

3. Committee Organization
EU Liquid Chemicals & Gases Committee
C: Jean-Marie Collard (Solvay Chemicals)
C: Gordon Ferrier (Air Products)
VC: Gummaar De Vos (FFEM)
Precursor Specifications TF
L: Paul Williams (SAFC Hitech)
Solvents in Advanced Processes TF
L: Gummaar DeVos (FFEM)

4. Meeting Information Last Meeting Next Meeting
October 20, 2010 at SEMICON Europa, Dresden, Germany
Next Meeting
Spring 2011 – details to be determined

5. Precursor Specifications Task Force
Leader: Paul Williams (SAFC Hitech)
Hafnium amides document (4701C) and Zirconium amides document (4702C)
Ballots issued in Cycle failed committee adjudication at SEMICON Europa. Will be revised and reballoted in Cycle
Tetramethylsilane (4MS) document abandoned – not used in large quantities by industry

6. Precursor Specifications Task Force (2)
4 new SNARFs approved at June 2010 TC meeting and scheduled for balloting in Cycle
Guide for Hafnium Tetrachloride (4993)
Guide for Hafnium t-Butoxide (4994)
Guide for Tetrakis(Dimethlyamino)Titanium (4995)
Guide for Zirconium t-Butoxide (4996)
List of next candidates for standardization:
HfCl4
TiCl4
ZrCl4 (per end-user request)
TDMAT [Ti(N(CH3)2)4]
PDMAT [Ta(N(CH3)2)5]
3DMAS [HSi(N(CH3)2)3]
TDMAS [Si(N(CH3)2)4]

7. Solvents in Advanced Processes TF
Leader: G. De Vos (FFEM)
Target list :
EG : Ethylene Glycol (following recommendation from ITRS)
PGME : propylene glycol methyl ether
PGMEA : propylene glycol methyl ether acetate
updating HMDS (hexamethyldisilazane) SEMI Standard
1st activity : guide for PGME/PGMEA/mixture
Key parameters reviewed
SNARF approved at committee
Draft document reviewed at October meeting
Ballot 4816 to be issued in Cycle

8. Standards past due for 5-year review
Leaders are reviewing the below Standards, originated by the European Gases and Liquid Chemicals Committee, to determine if they should be revised, reapproved, or withdrawn.
Committee
Standard
Gases
SEMI C Standard for Tungsten Hexafluoride, % Quality
SEMI C Specification for Diborane Mixtures
SEMI C Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
Liquid Chemicals
SEMI C Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2]

9. Thank you! For more information, please contact:
Carlos Lee, SEMI Europe
Ian McLeod, SEMI NA