1. Scanning Probe Microscope
- Seiko, SPA-400
안동대학교 공동실험실습관 유상훈

2. Contents
기기구조 및 원리
Apparatus
Application

3. SPA-400 구조

4. Main Body of SPM
Front open space
Magnetic fixed sample holder

5. Invention of SPM STM was invented by Binnig & Rohrer in 1981
- only for conducting material
- need high vacuum, ultra-cryo system
Invention of AFM at Stanford Univ. in 1985
- non-conductors as well as semi-conductor, insulator

6. Micro-Surface Analytic Tools
SEM(natural and FE-SEM)
- popular tool for analyzing surface, cross-section
- need sample preparation for non-conductors
TEM
- high resolution for microstructure
- very hard to prepare ultra-thin specimen
SPM
- direct measurement
- easy to handle samples
- high resolution and 3D image
- various applications(electric, magnetic..)

7. Advantage over SEM and TEM
Quantitative 3D Information
High Resolution: X-Y: 0.2nm, Z: 0.01nm
Easy Sample Preparation (non-conductor)
Various Operating Condition-vac., even in air, liquid
Various Measuring Modes-Electric, Magnetic, Physical
Atomic Scale Manipulation-Nanolithography

8. SPM Imaging Modes
STM(Scanning Tunneling Microscope) - Electronic Structure
AFM(Atomic Force Microscope) -Topography
DFM(Dynamic Force Microscope ) - Topography
KFM(Kelvin Force Microscope) - Surface Potential, Charge
MFM(Magnetic Force Microscope) - Magnetic Field
FFM, LFM(Friction Force Microscope) – Surface Friction
VE-AFM(Visco-Elastic AFM) – Hardness, Viscosity

9. Specification of SPA-400 Resolution : X-Y: 0.2nm, Y: 0.01nm
Scan Range : 20㎛, 100㎛
Sample Stage : 150mm
Optical Microscope : X 1,000

10. Atomic Interaction Force

11. Scanning Modes/Inter-atomic Force

12. Schematic Diagram of AFM

13. Optics for contact, NC, tapping-AFM

14. Cantilevers (SPM Probes)
Silicon Nitride
exhibit excellent flexibility
Contact AFM tip
Silicon crystal
high frequency oscillating(100kHz)
more stiffer than Si3N4
NC AFM tip

15. Carbon Nano Tube Probe High durability
- CNT is made of carbon and has high elasticity
Less contamination
- Chemically inactive graphite structure
- hydrophobic characteristics
- hard to be contaminated

16. Cantilever Holders

17. X, Y, Z - Scanners

18. Liquid Holder and Cell

19. SPM Scanning Modes Contact Mode(AFM) Tapping Mode(DFM)
Provide atomic resolution in air
Destructive method for soft sample
Tapping Mode(DFM)
Non-Contact Mode(DFM)
<Non-Contact Mode>
<Intermittent Mode>
Nondestructive method for soft sample
Suitable mode for the rough and sticky surface

20. Atomic Resolution(STM & AFM)
Atomic Step ( Si, AFM, in air)
STM image of Si

21. Principle of DFM Q-curve
- Cantilever를 공진시켜 시료표면과의 인력, 척력을 검출하여 표면형상 측정
Q-curve

22. DFM in Liquid
DFM in liquid is controlled by the high degree resonance of the cantilever

23. Application of DFM to Biology
Plasmid DNA

24. Image of MFM – Hard Disk Topography MFM image Topography MFM image
<스캔 영역 90㎛>
<스캔 영역 10㎛>

25. Potential difference between the natural oxide and field oxide
Image of KFM-thin metal film
- 시료와 탐침간에 작용하는 정전기력 이용, 시료의 표면전위 측정
Natural oxide : 970mV Field enhanced oxidation: 960mV
Topography（3.5 μm x 3.5 μm ）
Electrical Potential （3.5 μm x 3.5 μm )
Potential difference between the natural oxide and field oxide

26. Nanolithography with SPM
Si wafer (before modification)
SiO2 on Si pattern(after modification)