1. Improving the Electron Microscope
So we can see just a few more nanometers

2. Electron Optics Based on the principles of DeBroglie
Electrons and other particles have wave properties
Magnetic fields are analogous to optical lenses

3. Basics of Electron Microscopy

4. Types of Electron Microscopes
Scanning Electron Microscope (SEM)
Tunneling Electron Microscope (TEM)
Scanning Transmission Electron Microscope (STEM)

5. Limitations
Target sample must be modified to maintain in a high vacuum
Target sample must be conductive.
Electron Scattering

6. Causes of Poor Resolution
General Electron Diffraction
Electro-Optical Aberrations

7. Fixing Diffraction Quite simple…
It actually doesn’t need a whole slide to explain.

8. Scherzer ‘s Theory Non trivial
Scherzer’s Theory states that aberration will always occur if the following conditions are met:
(i) There is a rotationally symmetrical lens present
(ii) The beam is acted upon by a static field
(iii) The beam does not reverse its velocity

9. Correcting Electro-Optical Aberrations
1995 Researchers Have worked on Breaking symmetry on lenses.
Resolution improved from 20nm to about 6nm by 1995
Today We can achieve about .075nm resolution

10. Correcting Electro-Optical Aberrations

11. Correcting Electro-Optical Aberrations
Time varying Fields
Very complicated dealing with complex analysis
As of now, no one has been able to decrease aberration by implementing a time varying field

12. Ende’