1. SEM Image of Early Northeastern University MEMS Microswitch
The scale bar corresponds to 10 m

2. SEM Micrograph of a Contact Bump The scale bar corresponds to 1 m

3. SEM Image of Recent Northeastern University MEMS Microswitch

4. SEM Micrograph of the Contact Tip
2 m diameter

5. Side View of NU Micromechanical SwitchdT y L d x
Gate Drain
Source

6. Top View of NU Micromechanical Switch
(all dimensions in m) z 44 63 24
152 x
Contact
Tips
Source
(Fixed)

7. Modeling of Switch Dynamics and Bounce

8. Comparison of Model and Experiment for Switch Bounce

9. Drain Failure at High Current

10. Micromirror-Based Imaging System

11. Micromirror With Torsion Bars and Actuators

12. Cross-Section View
Actuator
Mirror w
54.70 t b g
Torsion Bar d tG G

13. Design Requirements Achieve a minimum angular rotation of  2o
Operate at 1 kHz
Limit the applied voltage to 200V to prevent surface breakdown
Limit shear stress of springs to MPa during operation
Ensure shock resistance during handling and use

14. Simulation and Measurements at 600 Hz, Unbiased
The measured and simulated angle of rotation vs. time (simulated curve is smooth) and the measured drive voltage vs. time.

15. Simulation and Measurements at 905 Hz, Biased
The measured and simulated angle of rotation vs. time (simulated curve is smooth) and the measured drive voltage vs. time.