1. New Process Capabilities for Media with The Intevac® 200 Lean System
Benjamin M. DeKoven
September 22, 2004

2. Agenda Equipment View of the Industry
Understanding the technology
Model system for next generation media
Process Module Opportunities and Capabilities
High utilization magnetrons for magnetic, non-magnetic, and soft underlayer materials
Protective films: plasma deposited overcoats and vapor deposited lubricants
Disk heaters

3. Equipment View of Industry Conditions
Technology
Economics
Cost Control Defines Success
Superb technology remains the foundation
Need to Leverage Existing Installed Equipment
Factories Expense Requires Maximum Output / ft2
New Media Advances
Continuous Source Improvement
New Source Requirements
Systems Nearing Capacity Limit for Number of Stations Needed
Technology and Economics Drive Equipment Design and Function

4. Understanding the Technology: Roadmaps or Wilderness?
Thicker Films for Soft Underlayers?
Thinner Films for Magnetic Coupling Layers?
More Seed Layers and Super Lattice Structures?
Or Fewer Layers?
Hotter Disks for Domain Control or Cooler Disks Having No Heat Processing?

5. Single Disk/Source Sputter Custom or 3rd Party Sources
Model System for Next Generation Media
Requirements
1. Retain Current Capabilities
2. Allow Fast/Convenient Servicing
3. Minimize Disk Handling
4. Maximize Productivity (Disk/ft2)
5. Enable Process Flexibility
6. Improve Process Station Vacuum
7. Eliminate Batching Effects
8. Prevent Source-to-Source Interference
Single Disk/Source Sputter
Custom or 3rd Party Sources
Same Software, Sources and Components
Maximize DPH in Small Footprint

6. Process Module Opportunities
High Utilization Magnetrons
Soft underlayer
Hard magnetic
Non-magnetic
Hard Overcoat Sources
Vapor Lubrication
Disk Heaters

7. Soft Underlayer Source
Requirements
Target Thickness > 6 mm
Removable Carriers: Platform and Architecture Must Support Carrier Exchange With Minimal Downtime
Magnetrons Must Provide Full Surface Erosion and Excellent Inventory (40%+)

8. High Utilization Magnetrons
New Pole Designs for Non-Mag and Hard-Mag Materials
Non-Mag:
Achieved 60% utilization, <3% uniformity with chromium
Hard-Mag:
Achieved 68% utilization, <4% uniformity with CoCr, <56% ptf
New Pole Design for SUL
Designed for full surface erosion
Designed for 6 mm FeCoB targets

9. High Utilization Source for Non-Mag
60% Target Utilization kWhr Target Life
62 Å/kWsec Dep Rate MÅ Target Inventory
Better than ±3% Radial Thickness Uniformity

10. High Utilization Source for Non-Mag
60% Target Utilization kWhr Target Life
62 Å/kWsec Dep Rate MÅ Target Inventory
Better than ±3% Radial Thickness Uniformity

11. High Utilization Source for Hard-Mag
68% Target Utilization kWhr Target Life
66 Å/kWsec Dep Rate MÅ Target Inventory
Better than ±4% Radial Thickness Uniformity

12. High Utilization Source for Hard-Mag
68% Target Utilization kWhr Target Life
66 Å/kWsec Dep Rate MÅ Target Inventory
Better than ±4% Radial Thickness Uniformity

13. High Utilization Source for SUL With Full Surface Erosion
Pole BHT % Target Utilization kWhr Target Life

14. Good Thickness Uniformity (<3%)
SUL Pole Design Achieves Full Surface Erosion as well as Good Target Utilization
Good Thickness Uniformity (<3%)

15. (Through SUL Target As Thick As1/4 Inch)
SUL Pole Design Achieves Full Surface Erosion as well as Good Target Utilization
High Field Strength
(Through SUL Target As Thick As1/4 Inch)

16. Protective Overcoat Technologies
Hydrocarbon Gas Derived Films Nearing End of Life at 2nm
Solid Source Techniques Allow Greater Density: Filtered Cathodic Vacuum Arc (FCVA), Sputter, Carbon Alternatives
Platform Must Be Designed to Accept FCVA 3rd Party Source
Single station operation
Full integration into hardware and software
Alternative Next Generation Films in R&D:
Reactive sputter (SiN and others)
New RF/DC source being productionized
Ionized PVD

17. Vacuum Vapor Lubrication
Conventional Approach . . .
Texture & Clean
Vacuum Coatings
(Cr, Co-alloy, Carbon)
Dip Lube Coating
Burnish
Certify
A New Approach . . .
Texture & Clean
Vacuum Coatings
(Cr, Co-alloy, Carbon)
Vapor Lube
Burnish
Certify
Vacuum Process
Lab Controlled Environment

18. Process Advantages of Vapor Lubrication2 4 6 8 10 12
Standard Lube
Vapor Lube
Cobalt Corrosion
Excellent Corrosion Performance
CSS Performance Equivalent to Standard Lube
Tunable Bonded Thickness Now Adjustable 5 10 15 20 25 30
Vapor Lube
Standard Lube
Bonded Thickness (Angstroms)
Process 1
Process 2
Process 3
Process 4
Process 5
Deposited Thickness = 28 A

19. Resistive Heater Provides More Uniform Heating of Disk Substrates
Provides More Efficient Heating of Glass Substrates
Heating Data:

20. Resistive Heater – Uniformity
One Heater Side Only, 65mm Glass Disk, at 1 kW for 6 Seconds, 240 °C Disk Temperature
Heating rate 33.3 °C/(kW-sec)
Disk temperature uniformity at ± 5 °C using a Inframetrics thermacam

21. Summary
Technology And Economics Continue to Drive Hard Disk Equipment Design and Function
Novel Pole Designs Under Test at Intevac for Magnetic and Non- magnetic Materials Achieved up to 70% Utilization and Good Uniformity (3-4%).
SUL Pole Design Achieved Full Surface Erosion As Well As Good Target Utilization (45%) and Uniformity (3%)
Vapor Lubrication Demonstrated Excellent Corrosion Resistance and CSS Performance Equivalent to Standard Lube
Resistive Heater Design Provided More Efficient and Uniform Heating Rates (30-35 °C/kW-s)

22. Acknowledgements Tina Asher Ian Latchford Pat Ward
David Brown Craig Marion Bob Weiss
Bruce Kakimoto Hari Ponnekanti Jun Xie
Ralph Kerns Bob Ruck