1. LATERALLY-DRIVEN DEFORMATION-ROBUST MEMS GYROSCOPES
WITH THREE SETS OF SYMMETRICALLY ARRANGED FOLDED-BEAM SUSPENSIONS
Speaker : 張淵哲
2009 / 11 / 10

2. Introduction
The MEMS vibratory gyroscope, which detects the Coriolis force proportional to the angular velocity, is used in a wide range of applications, such as personal mobile devices and systems that control the stability of automobiles and robotics.
In particular, gyroscopes used in automotive systems, have to guarantee long-term stability and high-reliability for over ten years, even when used at a wide range of temperatures and when subject to mechanical vibratory disturbances.

3. STRUCTURE DESIGN OF DEFORMATION ROBUST GYROSCOPES

4. FABRICATION PROCESS

5. SEM micrograph of gyroscopic structure

6. SIMULATIONS AND RESULTS

7. pressure controllable laser doppler vibrometer
Mode frequencies

8. Temperature and pressure controllable probe tester

9. The signal read-out circuitry and experimental setup

10. CONCLUSION
The SAF helps to improve and reduce the mode frequency shift in a wide temperature range. Additionally, by triangularly arranging the three sets of SAF, the nearest spurious mode was able to be separated by more than several kHz from the drive and sense modes.
Future research will focus on improving the linearity of the frequency shift.

11. Thanks for your listening !!