1. Presentation to: NIST Metrology Workshop Metrology for Atomic Precision Fabrication John Randall Chief Technical Officer Zyvex Corp.

2. Our Vision
Our vision is to be the leading worldwide supplier of tools, products, and services that enable adaptable, affordable, and molecularly precise manufacturing.

3. Atomic Precision Fabrication Metrology Requirements
Sub-Angstrom resolution position feedback
Stable nanopositioning in 3D
Atomically precise scanning probe tips
Tip to tip invariant structure
High aspect ratio
Mechanically, chemically stable
Electrically conductive
Atomically precise atom manipulation tools
Atomically precise size standards
Spatial phase-locking technique

4. Atom Probe Technology Extension of field ion microscopy
Atomic resolution 3-D deconstruction
Destructive
30% loss of atoms
Conducting sample required
Imago improvements
Semiconductor applications
Metrology for nanofabrication
Ideal for characterizing atomically precise tips and atom manipulation tools