1. North America Regional Standards Committee (NA RSC)
Liaison Report
November 2010

2. Outline Current Structure of NA Standards Committees
NARSC Fall 2010 Meeting Highlights
Overall TC/WG Updates
Upcoming Events
NA Standards Staff Changes
Regional Staff Contact Information
November 2010
NARSC Liaison Report

3. Current Structure of the NARSC [1/2]
NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer)
New!
Automated Test Equip Paul Roddy (Consultant) Ajay Khoche (Consultant)
Gases Tim Volin (Parker Hannifin)
Microlithography Wes Erck (W.Erck & Associates) Rick Silver (NIST)
HB-LED Iain Black (Philips) Sunil Phatak (Rubicon) Chris Moor (Semilab) Bill Quinn (Veeco)
Information & Control David Bricker (AMAT) Jack Ghiselli (Consultant) Lance Rist (ISMI)
Compounds Jim Oliver (Northrup Grumman) Russ Kremer (Freiberger)
PIC Mutaz Haddadin (Intel) Matt Fuller (Entegris)
Technical Architects Board (TAB) James Moyne (AMAT) Yaw Obeng (NIST)
EHS (NA) Chris Evanston (Salus Engineering) James Beasley (ISMI) Sean Larsen (Cymer) Eric Sklar (Safety Guru)
Liquid Chemicals Frank Flowers (FMC) Frank Parker (ICL Performance)
Photovoltaic Heiko Moritz (Caerus Systems) Win Baylies (BayTech Group)
MEMS / NEMS Win Baylies (BayTech Group) Mark Crockett (MEMSMART)
Silicon Wafer Noel Poduje (SMS) Dinesh Gupta (STA)
Facilities Phil Naughton (AMAT) Steve Lewis (CH2M Hill)
New!
Metrics David Bouldin (Fab Consulting) Mark Frankfurth (Cymer)
Traceability Win Baylies (BayTech Group) Yaw Obeng (NIST)
FPD (NA) Bill Colbran (Engenuity)
November 2010
NARSC Liaison Report

4. Current Structure of the NARSC [2/2]
NARSC Chair: Jackie Ferrell (ISMI) Chair: Sean Larsen (Cymer)
FPD (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS)
EHS (Taiwan) Shuh-Woei Yu (SAHTECH) Fang-Ming Hsu (TSMC)
EHS WG (Korea) Seoung Jong Ko (Hynix) Hyunsuk Kim (Samsung Elec.)
FPD Metrology (Korea) Jong Seo Lee (Samsung) Il-Ho Kim (LMS)
FPD (Taiwan) Tzeng-Yow Lin (ITRI) Jia-Ming Liu (TDMDA)
Facilities (Korea) Kwang Sun Kim (KUT) Insoo Cho (Shinsung ENG)
I&C (Taiwan) Robert Chien (TSMC)
Photovoltaic (Taiwan) Jeff Lee (Chroma) B.N. Chung (CMS/ITRI) Y.Y. Tsai (Delsolar) J.S. Chen (PVTC/ITRI) Ray Sung (UL Taiwan)
I&C (Korea) Chulhong Ahn (Hynix) Sammy Jeong (KC Tech) Gunwoo Lee (Miracom)
Regional Committees & Working Groups
November 2010
NARSC Liaison Report

5. NARSC Fall 2010 Meeting (November 7)
Meeting Highlights:
Supported formation of the NA 3DS-IC (Three-Dimensional Stacked Integrated Circuit) Committee
To be submitted for ISC approval at SEMICON Japan 2010
Presentation:
Discussion for future formation of the NA PV Automation Committee
November 2010
NARSC Liaison Report

6. NA Standards Fall 2010 Meetings November 8-11
Sunday
Monday
Tuesday
Wednesday
Thursday
Friday
Saturday 7 8 9 10 11 12 13
NARSC
EH&S
Facilities & Gases
HB-LED
Information & Control
Liquid Chemicals
MEMS/NEMS
Metrics
Photovoltaic
Physical Interfaces & Carriers
Silicon Wafer
Traceability
Locations
- SEMI
- AMAT
- Intel
November 2010
NARSC Liaison Report

7. Overall TC/WG Updates (from NA Standards Fall 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA Automated Test Equipment Committee
July 14, 2010
(b) New Standard for Memory STDF (Standard Test Data Format, #4782) balloted for C6-10, but failed to reach 60% Reballot for C1-11.
NA Compound Semiconductor Materials Committee
November 2, 2010
(p) New Standard for Round 100mm Germanium Wafers for Solar Cell Applications (#4808) passed TC review. (b) New Standard for GaN Wafers to be balloted for C1-11. (b) M23.3 revision document planned for early 2011 ballot Pending approval from JA CSM committee.
NA EHS Committee
November 11, 2010
(o) S9 withdrawal ballot passed TC review. (b) S2 revision ballot from S2 Non-Ionizing Radiation TF (#4774) to be balloted for C2-11.
NA Facilities & Gases Committee
November 9, 2010
(o) Appointed new co-chair Steve Lewis (CH2M Hill). (b) New activity for F47 (voltage sag) revision (#5079). (o) Approved transfer of Equip Fan Filter Unit (EFFU) task force and activity to Korea Facilities TC.
NA HB-LED
(p) Kick-off meeting held Nov 11 at SEMI HQ, well attended. (p) Approved HB-LED Wafer TF. Plan to form other TFs: carrier, automation, assembly (back-end).
November 2010
NARSC Liaison Report

8. Overall TC/WG Updates (from NA Standards Fall 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA I&C Committee
November 10, 2010
(b) GEM300 TF ballot 4824A (E5 revision) co-written with Korea I&C failed TC review. Reballot in early (o) Recipe and Parameter (RaP) TF disbanded, remaining activity transferred to Diagnostic Data Acquisition TF.
NA Liquid Chemicals Committee
November 9, 2010
(p) 2 new activities for statistical methods: Calibrating Particle Measurement Instruments (#5105) & Extrapolating Particle Measurement Data (#5106)
NA MEMS / NEMS Committee
November 8, 2010
(p) Developing 2 activities for MEMS Packaging: fluid permeation & fluid outgassing (b) Microfluidics flexible tubing (#4691) and MS5 revision (wafer bond strength, #5046) for C1-11
NA Metrics Committee
(o) Call for Participation: Expanding scope of E (equipment cost of ownership) to include related industries (FPD, PV, MEMS, HB-LED, etc.)
NA Microlithography Committee
July 13, 2010
(o) Awaiting LOA related to patents assessed as potentially material to SEMI P10 (mask orders).
November 2010
NARSC Liaison Report

9. Overall TC/WG Updates (from NA Standards Fall 2010 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA PI&C Committee
November 10, 2010
(p) New AUX doc – Overview Guide to SEMI Standards for mm wafers (#5108).
NA PV Committee
(b) New standard: Si Wafers for Use as PV Solar Cells (#4826A) ballot failed TC review, reballot C1-11.
(b) Approved 2 new standards: phosphorous oxychloride (#4832B) and measuring BRDF (#4921).
(o) Endorsed elevating PV Material TF to PV Material TC
(o) Disbanded NA PV Facilities TF.
NA Silicon Wafer Committee
November 9, 2010
(p) New SNARF for M1 revision to include 450 mm polished wafer (#5090). (p) New SNARF for M49 revision (wafer geometry measurement systems), include ZDD parameter (#5091).
(b) Several 5-year review ballots for C1-11.
NA Traceability Committee
November 11, 2010
(p) Approved AUX doc – List of Authentication Service Bodies for Use with SEMI T20.2 (#5092)
November 2010
NARSC Liaison Report

10. NA Standards Spring 2011 Meetings*
March 28–31
SEMI Headquarters in San Jose, California
Inviting local companies willing and able to host some of the meetings to maintain one-week format
Final schedule to be announced in mid-December
November 2010
NARSC Liaison Report

11. Upcoming NA Meetings Event Name Event Type Contents
NA HB-LED Committee
Committee & TF Meetings
February 22-24, 2011 In conjunction with Strategies in Light Conference Santa Clara, CA
NA Microlithography Committee
Committee Meeting
March 3, 2011 In conjunction with SPIE Advanced Litho Conference San Jose, CA
NA Standards Spring 2011 Meetings
Standards Meetings
March 28-31, 2011 SEMI Headquarters in San Jose, California Meeting venue & dates to be finalized in mid-December
NA Compound Semiconductor Materials Committee
May 16-19, 2011 In conjunction with CS MANTECH Indian Wells (Palm Springs), CA
NA Liquid Chemicals Committee
Early April 2011 To be hosted by FMC in Houston, TX Date, time, and venue to be finalized
November 2010
NARSC Liaison Report

12. NA Standards Staff Changes
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: I&C, ATE, NARSC
Meetings & Events Planning
General Information
New:
HB-LED
MEMS
Microlithography
STEPs/Workshops and Sponsorships
Ian McLeod
Manager, NA Standards Committees
Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / PIC
Metrics
Membership
Kevin Nguyen
Committees: Facilities / Gases / PV / PV Automation / Silicon Wafer
Traceability
November 2010
NARSC Liaison Report

13. 3081 Zanker Road San Jose, CA 95134 U.S.A.
Regional Staff Contact Information
Name
Paul Trio
Phone
Office Address
3081 Zanker Road San Jose, CA U.S.A.
Committees
In charge
NARSC Automated Test Equipment / HB-LED Information & Control / MEMS / Microlithography
November 2010
NARSC Liaison Report

14. Thank you!
November 2010
NARSC Liaison Report