1. Japan Gases and Facilities Committee Liaison Report
EU Spring Meetings 2011
May 26, 2011
Brussels, Belgium
Venue, Location, Date

2. Leadership Committee Co-chairs
Hiromichi Enami / Hitachi High Technologies
Isao Suzuki / MKS Japan

3. Current Committee Structure
Gases and Facilities Committee
Hiromichi Enami / Hitachi High Technologies
Isao Suzuki / Japan MKS
F1 Revision TF
Shuji Moriya / TEL AT
Yoshifumi Machii / Fujikin
Gas Panel Test Method TF
Shuji Moriya / TEL AT
Yoshifumi Machii / Fujikin
5-year-review TF
Yoshifumi Machii / Fujikin

4. Meeting Information Last Meeting Next Meeting
May 20, 2011 during Japan Spring Meetings 2011 at SEMI Japan, Tokyo, Japan
*Postponed from March 18 because of 311 massive earthquake in Japan.
Next Meeting
September 29, 2011 during Japan Fall Meetings 2011 at SEMI Japan, Tokyo, Japan

5. Ballot Result Failed Committee Review
Doc.5026A, Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1

6. Upcoming Ballot
Cycle 5, 2011
Doc.5026B, Revision to SEMI F1-96, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components including Revision to Add a New Subordinate Standard, Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components to SEMI F1

7. Task Force Reports (1/2) F1 Revision Task Force
In recent years, the request for cleanliness from users has been increasing. Regarding high purity gas piping systems and parts, the request for more tightened criteria of leakage than current SEMI F1 has been heard.
After long discussion, the TF concluded:
To revise F mostly editorial nature.
To add a subordinate standard to F1 -- Specification for Leak Integrity of Ultra-High Purity Gas Piping Systems and Components.
The TF took this approach since establishing more tightened criteria by means of revising SEMI F1 would seriously affect many parts, assembly, and equipment manufacturers.
Doc.5026A was submitted for Cycle 1, 2011, but failed.
Doc.5026B will be submitted for Cycle 5, 2011 and its voting result will be adjudicated at the next committee meeting in September.

8. Task Force Reports (2/2) Gas Panel Test Method Task Force
No activity
5-year-review Task Force
14 documents related to specification for surface mount gas distribution systems (F82 to F95) are due for 5 years review.
All of 14 reapproval ballots failed committee review in September, 2010.
The TF switched its activities to revise those documents.
SNARFs to revise those standards will be proposed to GCS.
TF wants to submit revision ballots for Cycle 5, 2011.

9. Thank you! For more information, please contact:
Akiko Yamamoto, SEMI Japan