1. ITRS 2003 Factory Integration Chapter Backup Material
ITRS Factory Integation TWG
2018/12/8
ITRS 2003 Factory Integration Chapter Backup Material
Agile Manufacturing Concepts
2018/12/8
ITRS Factory Integration TWG
FITWG 2000

2. Agile Manufacturing Means…
Quick turn around [*faster cycle] time for production
Quick turn around time without productivity deterioration
No productivity reduction even if many lots production formed with few wafers
Quick capability to product, scale and technology change
Quick ramp-up of equipment installation and product
Assure high productivity even if low production volume
to Satisfy these Requirements…
Speed
Product: short ramp-up time
Equipment: short ramp-up time
Product Quick Turn Around Time (QTAT)
Cost
Equipment high OEE
Product yield high at ramp-up
2018/12/8
ITRS Factory Integration TWG

3. Key Potential Solutions
Full Automation
Equipment Engineering System
Fundamental technology
Single Wafer Control
Multiple lots/single wafer control in equipment module (group)
Process Control
Fault Detection and Classification
Run to Run
Integrated Metrology
Direct Transportation
Real Time Scheduling (RTS)
Supply Chain Management (SCM)
2018/12/8
ITRS Factory Integration TWG

4. APC and Process Control Capabilities are Key Enablers for Agile Manufacturing
Module
Flow A
Process
Steps C D B
Target values
(Recipe and major parameters)
Physical Structure base control
Process Engineering
Eq.
Eq. Process control info.
Interpretation into what equipment can execute
F/F
APC
Device structure
Optimization Control
Information
Current center of interest
Detailed Eq. Status info.
Machine-to-Machine Difference and Adjustment
NPW Management and Control
Chamber wet cleaning and Specification
Time dependent performance change and compensation
Eq. Maint. and Rules
Eq. Process performance adj info.
Manufacturing Experience
Resource Consumption
Management
More focus for agile manufacturing

5. Interface (Logically Separated) For Data Collection Only
Remote monitoring
Remote diagnostics
Remote de-bugging/ fix
Remote sensing
Spare parts Mgt.
EES Diagram
The Equipment Engineering System (EES) will collect data via a new, standardized interface from production equipment. This interface will be for data collection only.
Equipment Control will continue to occur through the existing SECS/GEM interface.
Supplier Remote Location
EES (Equipment Engineering System)
Relation between
MES and EEC
APC App 1
APC App 2
e-Diag App 1
OEE App 1
OEE App2
FDC App1
EE Applications
Framework for
EE Capabilities
EE Data
Sharing
MES
Equipment Control
WIP Tracking
Factory Scheduling
Global
EE Data
EE Data
Collection
And Storage
Category & Level
of EE Data
Fire Wall
EE Data
On Demand EE
Access
Control
Equipment Engineering Network
Standardization of
EE Data Interface
Standard EE Data
Interface (Logically Separated)
For Data Collection Only
Continuous
Monitoring
Determination
of EE Data
SECS/GEM
Interface for
Equipment Control
Equipment Performance
Integrity
EE Data Sampling
& Transmission
Factory Network
2018/12/8
ITRS Factory Integration TWG

6. e-Manufacturing Hierarchy
ITRS Factory Integation TWG
2018/12/8
e-Manufacturing Hierarchy
Company to Company
(E-Commerce)
Suppliers
Company A
Company B
Factory to Factory
(E-Factory)
e-diagnostics
capability
Factory A
Factory B
firewall
Within a Factory
(E-Factory)
Manufacturing
Execution System - MES
EES
Equipment/AMHS
Equipment Engineering
System
AMHS
Eqpt
(side view)
Ethernet
Process or
Metrology
Equipment
(side view)
Control
System
Material Control
System - MCS
Station
Controller
2018/12/8
ITRS Factory Integration TWG
FITWG 2000

7. The e-Business structure for manufacturing
2018/12/8
ITRS Factory Integration TWG

8. The Next Generation Factory Concept
User’s SCM -
Supply Chain
Management
Planning
System
…..
…..
Direct
Transport
Mfg.
System
…..
…..
Agile
-Mfg.
EES
Wafer
Level Control
…..
….. E-
Diagnostic
Supporting
System
…..
Supplier’s
SCM
E-Mfg.
2018/12/8
ITRS Factory Integration TWG