1. HF/Vapor Reactor Automation for the Study of Semiconductor Surfaces
Genevieve Max
Dr. Anthony Muscat
Shariq Siddiqui
The Arizona/NASA Space Grant Undergraduate Research Internship Program
The University of Arizona
April

2. Semiconductors of Ge and III-V materials
Where are these semiconductors used?
Solid state devices for communications, computations and solar light applications
These devices are made by layering semiconductor, metal and dielectric thin films
It is important to characterize the chemistries at the interface of these layers
We study this interface

3. Surface Chemistry Reactions
Gases are used to deposit reactants on the semiconductor surface, then are pumped out
Preserves conditions of the reacted surface
In situ apparatus allows reactions to occur without air contamination
Credits: Muscat group

4. Project Objectives
We want to replace the hardware, and at the same time, we want to update the control program
Update the control system for HF/Vapor reactor using the newer version of LabView
New system will interact with DeviceNet hardware, a digital system replacing the analog system

5. Reasons for writing the new program
Hardware in reactor is outdated and difficult to work with
To upgrade the hardware to DeviceNet, need to write a new program that is compatible with this hardware
Credits: Muscat Group

6. Why LabView?
DeviceNet software provides an easy way for LabView to interact with the devices
Front Panel allows easy manipulation of program at runtime
Credits: Muscat Group

7. Front Panel
Credits: Muscat Group

8. How the new program was developed
Write code to control one device, then test its functionality
Does the code do what we want?
Integrate code from the existing HF reactor and the atomic layer deposition (ALD) reactor
ALD works with DeviceNet hardware, HF has functionality needed
Document the code
Add comments for future programmers

9. Results of updating hardware/software
Reactor panel easier to work with
Software can be modified to accept new hardware without major modification
Program nearly ready to be tested on fully built reactor
Credits: Muscat Group

10. Thank You for Your Attention
Questions?