1. Japan Micropatterning Committee
Liaison Report
June, 2011

2. <Region> <Committee>
Outline
Leadership
Organization Chart
Meeting Information
Ballot Results
New TFOF/SNARF
Upcoming Ballot
TF/WG reports
STEP/Workshop
<Month> <Year>
<Region> <Committee>

3. <Region> <Committee>
Leadership
Committee Co-chairs
Iwao Higashikawa (Toshiba)
<Month> <Year>
<Region> <Committee>

4. Organization Chart Micropatterning Committee 5 Year Review TF
Iwao Higashikawa / Toshiba
Mask Data Format for
Mask Tools TF
Toshio Suzuki / DNP
5 Year Review TF
Iwao Higashikawa / Toshiba
<Month> <Year>
<Region> <Committee>

5. <Region> <Committee>
Meeting Information
Last meeting
April 22th, 2011
SEMI Japan Office
Next meeting (Tentative)
December, 2011
If needed, the meeting will be held in September 2011.
<Month> <Year>
<Region> <Committee>

6. <Region> <Committee>
Ballot Results
None
<Month> <Year>
<Region> <Committee>

7. <Region> <Committee>
New TFOF/SNARF
Doc.5229 New SNARF for Revision to SEMI P , Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers
From Mask Data Format for Mask Tools TF
<Month> <Year>
<Region> <Committee>

8. <Region> <Committee>
Upcoming Ballot
None
<Month> <Year>
<Region> <Committee>

9. Mask Data Format for Mask Tools Task Force
Toshio Suzuki (DNP)
Activity
Doc.5229 New SNARF for Revision to SEMI P , Specification for Open Artwork System Interchange Standard (OASIS) Specific to VSB Mask Writers
The information ballot will be issued within this year.
Current
The next TF meeting will be held on 27 September, 2011.
<Month> <Year>
<Region> <Committee>

10. 5 Years Review Task Force
Iwao Higashikawa (Toshiba)
Current Activity
None
<Month> <Year>
<Region> <Committee>

11. Upcoming STEP/Workshop
None
<Month> <Year>
<Region> <Committee>

12. Regional Staff Contact Information
Name
Hiro’fumi Kanno
Phone
Office Address
Kudan-minami, Chiyoda-ku, Tokyo Japan
Committees
In charge
Japan Micropatterning Committee
<Month> <Year>
<Region> <Committee>