1. Japan Micropatterning Committee
Liaison Report
March, 2011

2. <Region> <Committee>
Outline
Leadership
Organization Chart
Meeting Information
Ballot Results
New TFOF/SNARF
Upcoming Ballot
TF/WG reports
STEP/Workshop
<Month> <Year>
<Region> <Committee>

3. <Region> <Committee>
Leadership
Committee Co-chairs
Iwao Higashikawa (Toshiba)
<Month> <Year>
<Region> <Committee>

4. Organization Chart Micropatterning Committee 5 Year Review TF
Iwao Higashikawa / Toshiba
Mask Data Format for
Mask Tools TF
Toshio Suzuki / DNP
5 Year Review TF
Iwao Higashikawa / Toshiba
<Month> <Year>
<Region> <Committee>

5. <Region> <Committee>
Meeting Information
Last meeting
September 29th, 2010
SEMI Japan Tokyo Office
Next meeting
April 22th, 2011
<Month> <Year>
<Region> <Committee>

6. <Region> <Committee>
Ballot Results
The following two documents passed at the previous Japan Micropatterning Committee in September, 2010.
4840 Revision to SEMI P , Specification for Job Deck Data Format for Mask Tools
4841 Revision to SEMI P , Specification for Open Artwork System Intercharge Standard (OASIS) Specific to Mask Tools
<Month> <Year>
<Region> <Committee>

7. <Region> <Committee>
New TFOF/SNARF
None
<Month> <Year>
<Region> <Committee>

8. <Region> <Committee>
Upcoming Ballot
None
<Month> <Year>
<Region> <Committee>

9. Mask Data Format for Mask Tools Task Force
Toshio Suzuki (DNP)
Activity
Doc. 4840, Revision to SEMI P , Specification for Job Deck Data Format for Mask Tools
Passed
Doc. 4841, Revision to SEMI P , Specification for Open Artwork System Intercharge Standard (OASIS) Specific to Mask Tools
Current
The TF met on 15th February, 2011 and discuss the revision to SEMI P45&P44.
The next TF meeting will be held on 28th June, 2011.
<Month> <Year>
<Region> <Committee>

10. 5 Years Review Task Force
Iwao Higashikawa (Toshiba)
Current Activity
None
<Month> <Year>
<Region> <Committee>

11. Upcoming STEP/Workshop
None
<Month> <Year>
<Region> <Committee>

12. Regional Staff Contact Information
Name
Hiro’fumi Kanno
Phone
Office Address
Kudan-minami, Chiyoda-ku, Tokyo Japan
Committees
In charge
Japan Micropatterning Committee
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<Region> <Committee>