1. Wet Etch Bay

2. BOE (13:2) monitoring chart
Oxide etch using 6:1 BOE
Etchant : 6 : 1 :: NH4F : HF (In house Prepared BOE)
BOE (13:2) monitoring chart
New Bottle opened on
July 9, 30
LOT No. 206AP6311

3. Metal Etch Etchant : 19 : 1 : 4 :: H3PO4 : HNO3 : H2O Temperature : RT
Etchant : 4 : 1 : 40 :: KI(g) : I2 (g): H2O
Temperature : RT
Etchant : 19 : 1 : 4 :: H3PO4 : HNO3 : H2O
Temperature : RT
New bottle of potassium Iodide is opened on 11 march 2017
New bottle of Iodine is opened on 20 september 2016

4. DI Water Resistivity At Wet Etch Bay