1. ION BEAM ANALYSIS

2. Participant: Nataliya Paltseva (Slovak Republic, Comenius University in Bratislava)
Supervisor: Alexander P. Kobzev, PhD.
Place of work: Frank Laboratory of Neutron Physics

3. RUTHERFORD BACKSCATTERING SPECTROMETRY (RBS)

4. Kinematic factor

5. Differential scattering cross section

6. Height of the energy spectrum
ΔE - the energy difference observed for ions scattered from the surface and from depth x; E0, E1 - incident and exit energies; ε - stopping cross section factor

7. RBS energy spectrum

8. Experimental conditions :
Spectrum file : F.142
Type of the beam ( atomic number ) :
Energy of the beam in [MeV] :
Solid angle of detector [sr] :
Angles between target and beam [deg] IBM :
Cornell :
Angle between detector and beam [deg] :
Detector resolution [keV] :
Integrator count :
Constant of integrator (In exp. form) : E+10
Calibration Energy - Channel E = A*k + B
A =
B =
Depth Element Concentrations (at %)
nm Ru Sr Fe Si O

9. Particle Induced X-ray Emission (PIXE)
The incident beam particles eject inner shell electrons from the target atoms which results in the emission of characteristic x-rays.
Moseley's Law:

10. PIXE energy spectrum

11. RBS energy spectrum

12. Concentration [%] of elements in the sample obtained by using methods RBS and PIXE
Sample N7 C N O Na Mg Al Si S Cl K Ca
RBS 37 21 25
3,2
3,1
5,2
1,3
PIXE
0,006
0,01
0,3
RBS
PIXE Ti V Mn Fe Cu Zn As Sr Zr
0,42
0,02
0,05
0,01
0,04

13. The advantages and weakness of RBS:
well suited for thin film analysis
provides depth information without the requirements for destruction of the sample
rapid analysis
high sensitivity
The advantages and weakness of PIXE:
capable to recognize each element heavier than C
suitable for trace element analysis
no depth information
only general information about concentration

14. Thank you for attention!