1. Lecture 3: Resistivity
1.3 Wafer Mapping
1.3.1 Double Implant

2. 1.3.2 Applied Current Tomography
1.3.3 Modulated Photo-reflectance

3. Lateral; How about vertical?
1.3.4 Optical Densitometry
implants
doping
resistivity
Lateral; How about vertical?

4. Removing, Measuring; …… 1.4 Resistivity Profiling
1.4.1 Differential Hall Effect
Removing,
Measuring; ……

5. 1.4.2 Spreading Resistance Profiling

6. Contactless Methods
1.5.1 Eddy Current
Q changes when more power absorbed
More power absorbed due to conductivity
Or resistivity of electronic materials or wafers !

7. 1.5.2 Confocal Resonator
Surface resistance analyzer (SRA)

8. 1.6 Conductivity Type
1.6.1 From information sheet or……
1.6.2 Thermoelectric probe method (Seebeck)
1.6.3 Rectification method
1.6.4 Hall effect