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Chem 750/7530 Antony D. Han
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Experiments 1~3 : Vapour phase CVD Ferrocene/benzene
NiCl2 /(benzene)1/2 and (methanol)1/2 4~5 : thermal CVD Silicon substrates with Ni catalysis 5 nm and 10 nm of Ni benzene as the C source
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Results and discussion
VPCVD Thermal CVD
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Why? — two mechanism Root growth: Tip growth: the reverse mechanism
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However Conclusion: Well explained the difference between the experimental observation and conventional theoretical mechanism Proposed a mechanism for vapour phase CVD Compared between conventional thermal CVD and spray pyrolysis ( VPCVD)
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