1. Nanolithography using DI Nanolithography Software for Explorer
PMMA C6 spun at 4000 RPM onto a Si(100) Substrate: thickness ~ 200 nm
Baked at 115oC for 30 seconds
Pattern scratched onto surface:
Previously used NSC A tip did the actual writing
T-B ~ -5 nA, Setpoint = 5 nA
With feedback off, a relative z offset of 100 nm was added to the z scanner to move the tip closer to the surface
Write speed was 1mm/s
Before
After

2. Nanolithography: OU Symbol

3. Nanolithography: OU Symbol - Zoom in

4. Nanolithography: OU Symbol - Line Scan

5. Nanolithography: OU Symbol - 3D View

6. Nanolithography: Luke -first write

7. Nanolithography: Vertical and Horizontal lines

8. Nanolithography: Tip image Before and After