1. Aileen O’Mahony, Anil Mane, Jeff Elam 1/21/2014
ALD Update
Aileen O’Mahony,
Anil Mane, Jeff Elam
1/21/2014

2. As-ground MCPs
450 MΩ
dummy
410 MΩ
400 MΩ
Dummy
350 MΩ
280 MΩ
300 MΩ
310 MΩ
460 MΩ
530 MΩ
380 MΩ
Precursor inlet
Outlet
Precursor flow
17 as-ground wax free MCPs coated in single batch using a MCP holder fabricated by UCB. (Many thanks to UCB team)
These had degased for UCB. MCPs splits into ALO passivated (20nm) and non passivated

3. As-ground MCPs 17 as-ground MCPs coated in one batch
MCP ID
R (Mohm) post-anneal
20 nm ALO pass MCP1, position1
450
20 nm ALO pass MCP2, position 3
400
20 nm ALO pass MCP3, position 5
530
20 nm ALO pass MCP4, position 8
280
20 nm ALO pass MCP5, position 13
20 nm ALO pass MCP6, position 18
300
20 nm ALO pass MCP7, position 2
20 nm ALO pass MCP8, position 23
310
20 nm ALO pass MCP9, position 4
460
No ALO pass. Position 10
380
No ALO pass. Position 15
No ALO pass. Position 16
No ALO pass. Position 20
410
No ALO pass. Position 21
No ALO pass. Position 22
350
No ALO pass. Position 24
No ALO pass. Position 25
MCPs are sent to UCB for testing,
4 pairs will be back to UoC (Matt for Cs study)

4. Grid Spacers
8”x8” mm grid spacer coated with Chem1 (for Andrey). Annealed at 400C in Beneq
After R measurements
6 cm grid spacers to be coated once R measured (for Bob)
More 8” 2mm GS will be coated