1. Procedure for Particle Lithography and Chemical Vapor Deposition of Organosilane SAMs
Deposit latex particles onto silicon substrate
Dry latex templates under ambient conditions
Form self-assembled monolayers of silanes via chemical vapor deposition
Remove latex particles by rinsing surface

2. Structure of alkylsilane SAMs
H2O 1 2
1. Hydrolysis 3
-H2O
2. Adsorption
3. Condensation
head group
linker
Si-O linkage
Si/SiO2 substrate
Structure of alkylsilane SAMs

3. Topography Phase 100 nm Topography Phase 300 nm
Tapping Mode AFM images of 2-[Methoxy(polyethyleneoxy)propyl]trichlorosilane (PEG) prepared via Particle Lithography and Chemical Vapor Deposition