1. North America Liquid Chemicals Committee
Liaison Report
December 1st, 2011
NA LChem Report - December 2011

2. Outline Task Force & Leadership Changes New SNARF Organization Chart
Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
NA LChem Report - December 2011

3. Task Force and Leadership Changes
New TFOF
SEMI F39 (Chemical Blending Systems) & F41(Chemical Distribution System) Rewrite TF
Leaders
David Kandiyeli (Ichor Systems)
Koh Murai (Ichor Systems)
TF will also include re-write of F31 (Bulk Chemical Distribution Systems)
NA LChem Report - December 2011

4. New SNARFs
Doc. 5354, Revision to SEMI C , Guideline for Trans 1, 2 Dichloroethylene
Doc. 5355, Revision to SEMI C , Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade
Doc. 5356, Revision to SEMI C , Specifications and Guidelines for Xylenes
NA LChem Report - December 2011

5. Leadership Committee Co-chairs Frank Flowers / FMC Frank Parker / ICL
NA LChem Report - December 2011

6. Current Committee Structure
NA LChem Report - December 2011

7. Meeting Information Last meeting Next meeting
October 25 for NA Fall 2011 Meetings San Jose, California
Next meeting
April 3 for NA Spring 2012 Meetings San Jose, California
NA LChem Report - December 2011

8. Document Review Summary Cycles 6 [1/2]
Document Title
Committee Action
4555A
Revision to SEMI F With Title Change To: Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Passed as balloted
5189
Revision to SEMI F With Title Change To: Particle Test Method Guide for Evaluation of Components Used In Ultrapure Water and Liquid Chemical Distribution Systems
Passed as balloted.
5190A
Revision to SEMI C With Title Change To: Guide for Boron Tribromide
NA LChem Report - December 2011

9. Document Review Summary Cycles 6 [2/2]
Document Title
Committee Action
5192A
Revision to SEMI C , With Title Change To: Guide for Phosphorus Oxychloride
Passed as balloted. Superclean
5298
Revision of SEMI C , Specification for Dichloromethane (Methylene Chloride)
Passed as balloted.
5299
Revision of SEMI C26 With Title Change To: Specification and Guide for Hexamethyldisilazane (HMDS)
Failed and reballoted
NA LChem Report - December 2011

10. Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings [1/2]
* Voting Period – Cycle 1&2 *
Document #
Document Title
TF / SC
4543A
Revision of SEMI C , Specification and Guidelines for Ammonium Fluoride 40%
Analytical Methods TF
4544C
Revision of SEMI C , Specification for n-Butyl Acetate
5299A
Revision of SEMI C , Specification and Guideline for Hexamethyldisilazane (HMDS)
4547C
Revision of SEMI C , Specifications for n-Methyl 2-Pyrrolidone
4957A
Revision of SEMI C , Specifications and Guidelines for 2-Propanol
NA LChem Report - December 2011

11. Technical Ballots to be reviewed at NA Standards Spring 2012 Meetings [2/2]
* Voting Period – Cycle 1&2 *
Document #
Document Title
TF / SC
5193
Revision of SEMI C , Guideline for 25% Tetramethylammonium Hydroxide
Analytical Methods TF
5354
Revision of SEMI C , Guideline for Trans 1, 2 Dichloroethylene
5355
Revision of SEMI C , Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade
5356
Revision of SEMI C , Specifications and Guidelines for Xylenes
NA LChem Report - December 2011

12. Task Force Updates Analytical Test Methods TF Statistical Methods TF
Performing 5-year review on following standards
C20 (Ammonium Fluoride), C24 (Butyl Acetate), C26 (HMDS), C33 (n-Methyl 2-Pyrrolidone), C41 (2-Propanol), C46 (Tetramethylammonium Hydroxide), C47 (Dichloroethylene), C48 (Trichloroethane), and C51 (Xylenes)
Statistical Methods TF
Topics of interest:
Cross-calibration across counters (doc. 5105)
Extrapolation to smaller particle sizes (doc. 5106)
NA LChem Report - December 2011

13. Task Force Updates [continued]
F57 Revision TF
Ballot 4555A (F57 update) passed TC review.
F104 Revision TF
Ballot 5189 (F104 revision) updated more closely with F57 in terms of components cited in these documents.
Ballot passed TC review.
NA LChem Report - December 2011

14. Task Force Updates [continued]
Polymer Surface Roughness TF
Drafting doc. 4989, New Standard: Test Method for Determining Surface Roughness in Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
UPW Filtration Efficiency
TF formed to address inaccuracy of optical particle counters measuring at very small sizes, specifically in high purity water.
Draft ballot (#5188) in progress
Round robin testing to start in August with ballot targeted for April 2012
NA LChem Report - December 2011

15. 5-Year Review Documents
The committee allowed the following F Standards to go into Inactive status:
Standard
Document Title
SEMI F34
Guide for Liquid Chemical Pipe Labeling
NA LChem Report - December 2011

16. Upcoming Meeting Schedule at SEMI Headquarters, San Jose, CA
Monday, April 2
F104 Rewrite TF (1:00 PM to 2:00 PM)
F39 & F41 Rewrite TF (2:00 PM to 3:00 PM)
Polymer Surface Roughness TF (3:00 PM to 4:00 PM)
UPW Filtration TF (4:00 PM to 5:00 PM)
Tuesday, April 3
Statistical Methods TF (8:00 AM to 10:00 AM)
Analytical Methods TF (10:00 AM to 12 Noon)
Liquid Chemicals Committee (1:00 PM to 4:00 PM)
NA LChem Report - December 2011

17. NA Standards Staff Changes
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Kevin Nguyen
Manager, NA Standards Committees
Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability
Standards Website
Provisional: Contact Paul Trio or Kevin Nguyen
Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC
Hiring of new NA Standards staff has been completed. Official announcement by the end of the month.
NA LChem Report - December 2011

18. Thank You!
NA LChem Report - December 2011