1. アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector
SCT-v1,
アトラスシリコン半導体飛跡検出器：ATLAS Silicon-strip Tracking Detector
ATLAS SCT Collaboration: Australia, Czech, Germany, Japan, Netherlands, Norway, Poland, Russia, Slovania, Spain, Sweden, Switzerland, UK, US, CERN
Specifications (Barrel part only)
Sensor: 8448 Sensors, x 63.96x mm3, p-in-n single sided
strip pitch 80 mm, implant width mm, total area = 34.4 m2
full depletion < 150V (initial), <350V (after 3x1014p/cm2)
Module: 2112 modules, Stereo angle: 40 mrad
TPG thermal conductor (UK), Flexible hybrid circuit (Japan)
12 ABCD chips (BiCMOS ASIC)/module, 1536 ch, 5000 bondings
assembly accuracy < 5-1 mm control
Cylinder: 4 cylinders, r = 30-52cm , |η|<1.4
Radiation: 3×1014 n/cm2 (10 years), Operating Temperature: -7C
Fabrications: modules by 980 Japan, UK, US and Scandinavia
Testing of radiation hardness using KEK PS beams
Cooling test at KEK
Radiation damage estimation
Instrumentations at KEK clean room
2001 Final sensor design
Japan provided 6000 sensors
Design and fabrication of the readout hybrid
Module assembly ( )
High precision assembly fixtures by KEK
KEK designed the flexible Cu/Polyimide circuit with Nippon Mektron LTD
Hybrid assembly in Seiko Precision LTd.
Automatic wire bonding, about 5000 bonding/module at Hamamatsu/Seiko
3D measurement station for alignment at Hamamatsu/Seiko.
Pattern of glue points on the VHCPG base-board
3-axis dispensing workstation
Assembly microscope unit for sensor alignment developed by KEK
Alignment accuracy between front and back sensor planes versus module number. Best achievement among 4 regions !!
Leakage current distribution after module assembly at 350 V.
>95% yield, the best among 4 regions !!
Japan made 980 modules
Module production took full 3 years
System assembly and commissioning ( )
Module mounting robots tested by KEK
Modules mounted on 4 cylinders at Oxford University using KEK robots
SCT-TRT docking successfully done at CERN SR1using assembly tools designed and fabricated by KEK
cosmic-ray track observed at SR1 !
SCT-v1,