1. European Equipment Automation Committee
Liaison Report for:
Physical Interfaces & Carriers
Metrics
Information & Control
Updated October 25, 2011
Venue, Location, Date

2. Leadership Committee Co-chairs Alfred Honold / InReCon
Co-chair of: I&C, PIC, Metrics
Massimo Carrubba / Numonyx
Co-chair of: I&C and PIC
Lothar Pfitzner / FhG IISB
Co-chair of: Metrics
Frank Petzold / Trustsec
Vice-chair of: I&C

3. Current Committee Structure
Equipment Automation Committee
C: Alfred Honold / InReCon (I&C, PIC, Metrics)
C: Massimo Carrubba / Numonyx (I&C, PIC)
C: Lothat Pfitzner / FhG IISB (Metrics)
VC: Frank Petzold / Trustsec (I&C)
International Environmental
Contamination Control TF
L: M. Furukawa / SEP
L: R. Henderson / Yield Services
L: M. Otto / FhG IISB
SANPRO (Sensor Actuator
Network Communication
Standard for PROFInet) TF
L: R. Enderes / Inficon
Metrics
I&C
Integrated Measurement TF
L: G. Roeder / FhG IISB
PCS TF
L: M. Schellenberger / FhG IISB
Int’l SMIF Pod & Load Port
Interoperability TF
L: A. Gettel / GlobalFoundries
PIC

4. Meeting Information Last meeting Next meeting
October 12, 2011, Dresden, Germany in conjunction with SEMICON Europa
Next meeting
October 2012, SEMICON Europa, Dresden Germany

5. Ballot Results from SEMICON Europa
No ballots were reviewed.

6. Metrics Committee (1/2)
International Environmental Contamination Control (IECC) TF
Leaders: L: M. Furukawa / SEP, R. Henderson / Yield Services, M. Otto / FhG IISB. Coach - Lothar Pfitzner/Fraunhofer
Charter: Extend existing test methods for the determination of particulate, inorganic, and airborne molecular contamination in minienvironments
Current Activities
Contamination control in carriers for masks (MEDEA+ 2T30 CRYSTAL Project; ANNA Project)
Contamination control in carriers and equipment for 450 mm wafers – Definition of contamination standards (Contacts with ISMI to be intensified)
VDI/SEMI-Projekt "Mini-Environments" for a new standard (Fraunhofer, VDI, Infineon, InReCon, MCRT, Semisol, GloFo,…)
Did not meet at SEMICON Europa.

7. Metrics Committee (2/2) Integrated Measurement Task Force
Leader: Georg Roeder/Fraunhofer IISB
Current Activity:
5 years review of E104 and E141
SEMI E Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
SEMI E Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor
Both passed superclean
Continuation of discussions to extend metrology standards to PV applications and E141 also for stand-alone ellipsometry is planned

8. Metrics Standards due for five-year review
Currently Published Designation #
Standard Title
Referenced Standards
Committee
SEMI E (Reapproved 0307)
TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION/TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY (VPD/TXRF), VPD/ATOMIC ABSORPTION SPECTROSCOPY (VPD/AAS) OR VPD/INDUCTIVELY COUPLED PLASMA-MASS SPECTROMETRY (VPD/ICP-MS)
C28, C35, E19, M1
Equipment Automation
(Metrics)
SEMI E
TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
E19, E108
SEMI E
TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY MASS SPECTROSCOPY
E46, F21
Staff Report - October

9. Information and Control Committee (1/2)
SANPRO TF:
Leader: Rolf Enderes/Inficon
Working on two ballots for adjudication at NA Spring Meeting. Will seek ballot authorization at NA Fall Meeting
4992: New Standard: Specific Device Model for Pressure Control Valves
4987: New Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
Second activity will be revising
SEMI E54.8 Standard for Sensor Actuator Network Communications for PROFIBUS
SEMI E54.14 Standard for Sensor Actuator Network Communications for PROFINET
with new upcoming Device Specific Models and to correct any defects if found.
Third activity will be to review upcoming SEMI E54.x Standard drafts for Sensor Actuator Network Communications.

10. Information and Control Committee (2/2)
Process Control Systems Task Force
Charter: To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities
Leaders:
Martin Schellenberger (Fraunhofer IISB)
Dr. Armin Schels, Infineon
Current Activity: Virtual Metrology
Prediction of physical and electrical parameters of wafers and devices from information collected from the manufacturing tools and from other available sources, e.g., production context information and up-stream metrology.

11. 11

12. Information and Control Committee (4/4)
IMA Survey
Scope
on virtual metrology extensions to PCS
on application of APC to new markets such as solar and display
Topics for VM
Definitions
Capabilities
Requirements
Expected benefits
If anyone is interested to participate, please contact:
Martin Schellenberger,

13. Physical Interfaces and Carriers Committee (1/2)
International Reticle SMIF Pod and Load Port Interoperability Task Force
Charter: will work on reticle SMIF pod and related LP standards to specify:
(1) Carrier Placement Sensing Pad locations, sizes and heights
(2) Info Pad for lockout features locations, sizes and heights
(3) Ports (e.g. used for purging) – locations, sizes 13
1/16/2019
Event, Venue information

14. Physical Interfaces and Carriers Committee (2/2)
Charter: (Con’t)
Furthermore, TF will review the referenced documents of the LP and pod standards – a recent ballot comment has revealed missing or outdated references in the document.
It is the goal of the TF to make as small changes as possible to limit the impact of any of the changes for the industry. The intent is to affect future implementations, not existing implementations.
Leader: Astrid Gettel/GLOBALFOUNDRIES

15. Thank You!
For more information or to participate in any EU Equipment Automation Committee activities, please contact Yann Guillou at SEMI