1. SIA in China ESH Report February 2011
Chinese Semiconductor Industry Association
SIA in China ESH Report
February 2011

2. Activities Update – PFC
:average rate:-10%
:average rate:13.8%
:average rate:25%
based on actual data
data is forecasted based on 2010 data (sqcm growth rate: : 30%, : 15%; Formula: WSC NER spreadsheet)
Note:

3. China PFC Reduction Goal
Activities Update – PFC
China PFC Reduction Goal
Since the semiconductor industry is still ramping up in China, SIA in China agrees NER is an achievable PFC reduction goal
SIA in China agrees to a post-2010 voluntary PFC emission reduction program target, 30% NER (Normalized Emission Rate, unit: CO2 kg per wafer out surface area in cm2) reduction for 2020, compared to 2010
We will utilize best practices technology to reach our goal

4. Activities Update – QT (Water)

5. Activities Update – QT (Waste)
2009 data did not include non-production waste, so the value in 2010 appears significantly higher than in 2009
SIA in China agrees to reduce 10% landfill waste from 2011 to 2020, based on data from 2010

6. Activities Update – QT (Energy)
SIA in China agrees to the goal of reducing 15% from 2011 to 2020, based on 2010 data

7. Activities Update – PFOS
SIA in China collected PFOS data from member companies and completed PFOS mass balance of 2009 and 2010, which contained PFOS usage and emission data, as shown on the following pages
No non-critical usage since 2009

8. PFOS Data (Critical Use)
Activities Update – PFOS
PFOS Data (Critical Use)
Type
2009 (kg)
2010 (kg)
Resist
3.67
4.93
BARC
0.05
0.14
TARC
80.16
13.79
Total
83.87
18.85

9. Activities Update – PFOS
PFOS Emission Data
Type
2009 (kg)
2010 (kg)
Resist
0.07
0.08
BARC
0.00
TARC
0.80
0.14
Total
0.87
0.23

10. Chinese Semiconductor Industry Association