1. Quartz Product 소개
June. 2011
Nanoinside Inc.

2. Content Tube, Boat, Assembly Dry Etch & Wet Etch 3. Thin Film & RTP
4. MOCVD for LED
5. Contact Information

3. 1. Tube , Boat & Assembly

4. 2. Dry Etch & Wet Etch parts

5. 3. Thin Film & RTP parts

6. 4. LED MOCVD Gas injector Gas Distribution Title Gas Inector Material
Quartz
Equipment
Axitron 11 x 2”
Process
MO CVD
Application
Gas 분사
Gas Distribution
Title
Gas Distribution
Material
Quartz
Equipment
Axitron 11 x 2”
Process
MO CVD
Application
Gas distributions

7. Tension Disk Top Title Tension Disc Top Material Quartz Equipment
Axitron 11 x 2”
Process
MO CVD
Application
Wafer Setting

8. Quartz Ceiling Diffusion Barrier Title Quartz Ceiling Material Quartz
Equipment
Axitron 11 x 2”
Process
MO CVD
Application
Equipment Cover
Diffusion Barrier
Title
Diffusion Barrier
Material
Quartz
Equipment
Axitron 11 x 2”
Process
MO CVD
Application
Equipment Cover

9. 5. Contact Information
Nanoinside Inc.
Address: #300 , Cheoncheon-Dong, Jangan-Gu,
Suwon-Si, Kyunggi-Do, Korea (Zip: )
Sungkyunkwan University 2nd Engineering Bldg.,
27501B
Tel:
Fax:
M.P:
Sales and Marketing Director
Chan Woo Lee
Contact Us
General Info :