1. European Equipment Automation Committee
Liaison Report for:
Physical Interfaces & Carriers
Metrics
Information & Control
Updated June 14, 2010
Venue, Location, Date

2. Leadership Committee Co-chairs Alfred Honold / InReCon
Co-chair of: I&C, PIC, Metrics
Massimo Carrubba / Numonyx
Co-chair of: I&C and PIC
Lothar Pfitzner / FhG IISB
Co-chair of: Metrics
Frank Petzold / Trustsec
Vice-chair of: I&C

3. Current Committee Structure
Equipment Automation Committee
C: Alfred Honold / InReCon (I&C, PIC, Metrics)
C: Massimo Carrubba / Numonyx (I&C, PIC)
C: Lothat Pfitzner / FhG IISB (Metrics)
VC: Frank Petzold / Trustsec (I&C)
New leadership, new activity
International Environmental
Contamination Control TF
L: M. Furukawa / SEP
L: R. Henderson / Yield Services
L: M. Otto / FhG IISB
SANPRO (Sensor Actuator
Network Communication
Standard for PROFInet) TF
L: R. Enderes / Inficon
Metrics
I&C
Integrated Measurement TF
L: G. Roeder / FhG IISB
PCS TF
L: A. Schels / Infineon
L: M. Schellenberger / FhG IISB
New activity
Review of existing standards
Work completed and TF disbanded
International E84 Revision TF
L: J. Rothe / GlobalFoundries
L: M. Otani / Asyst-Shinko
PIC

4. Meeting Information Last meeting Next meeting
9 June 2010, Munich, Germany, in conjunction with Intersolar
Next meeting
October 2010, Dresden, Germany in conjunction with SEMICON Europa

5. Metrics Committee (1/2)
International Environmental Contamination Control (IECC) TF
Leader: Michael Otto/Fraunhofer
Charter: Extend existing test methods for the determination of particulate, inorganic, and airborne molecular contamination in minienvironments
Current Activities
Contamination control in carriers for masks (MEDEA+ 2T30 CRYSTAL Project; ANNA Project)
Contamination control in carriers and equipment for 450 mm wafers – Definition of contamination standards (Contacts with ISMI to be intensified)
VDI/SEMI-Projekt "Mini-Environments" for a new standard (Fraunhofer, VDI, Infineon, InReCon, MCRT, Semisol, GloFo,…)

6. Metrics Committee (2/2) Integrated Measurement Task Force
Leader: Georg Roeder/Fraunhofer IISB
Current Activity:
5 years review of E104 and E141
SEMI E Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology
SEMI E Specification for Integration and Guideline for Calibration of Low-Pressure Particle Monitor
Working to get PV industry involved in E141 (integrated ellipsometer) reapproval/revision

7. Information and Control Committee (1/2)
SANPRO TF:
Leader: Rolf Enderes/Inficon
Working on two ballots for Cycle 6, to be reviewed at SEMICON Europa (October 2010)
4992: New Standard: Specific Device Model for Pressure Control Valves
4987: New Standard: Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
Next activity will be to review upcoming SEMI E54.x Standard drafts for Sensor Actuator Network Communications.

8. Information and Control Committee (2/2)
Process Control Systems Task Force
Charter: To define an online Process Control System (PCS) Architecture Framework inclusive of run to run, fault detection and classification, and statistical process control capabilities
Leaders:
Martin Schellenberger (Fraunhofer IISB)
Dr. Armin Schels, Infineon
Current Activity: Virtual Metrology
Prediction of physical and electrical parameters of wafers and devices from information collected from the manufacturing tools and from other available sources, e.g., production context information and up-stream metrology.

9. Physical Interfaces and Carriers Committee (1/2)
Completed ballot for withdrawal of E103: Mechanical Specification for a 300 mm Single-Wafer Box System that Emulates a FOUP, was developed by the European Equipment Automation Committee
Ballot review performed at June 9 meeting. E103 will be withdrawn pending A&R procedural review. 9
1/18/2019
Event, Venue information

10. Physical Interfaces and Carriers Committee (2/2)
E84 Revision TF
Successfully published SEMI E : Specification for Enhanced Carrier Handoff Parallel I/O Interface
TF disbanded

11. Thank You!
For more information or to participate in any EU Equipment Automation Committee activities, please contact James Amano at SEMI