1. North America Liquid Chemicals Committee
Liaison Report
November 2010

2. Outline Leadership Organization Chart Meeting Information
Notable / New Activities
Ballot Results
New TFOFs/SNARFs
Recent, Current, & Upcoming Ballots
Task Forces
July 2010
NA Liquid Chemicals

3. Leadership Committee Co-chairs Frank Flowers (FMC) Frank Parker (ICL)
July 2010
NA Liquid Chemicals

4. Organization Chart North America Liquid Chemicals Committee
C: Frank Flowers (FMC)
C: Frank Parker (ICL)
Liquid Chemicals SC
C: Frank Flowers (FMC)
C: Frank Parker (ICL)
Liquid Chemicals Distribution SC
C: (vacant)
Analytical Methods TF
C: Frank Flowers (FMC)
C: Frank Parker (ICL)
F57 Revision TF
L: James Henry (Arkema)
F63 Revision TF
L: Slava Libman (MW Zander)
Statistical Methods TF
Temporary L: Frank Flowers (ICL)
Surface Area of Polymer Pellets TF
L: Marty Burkhart (Hi Pure Tech)
July 2010
NA Liquid Chemicals

5. Meeting Information Last meeting Next meeting
2010/11/09 at SEMI Stds NA 2010 Fall Meetings San Jose, CA
Next meeting
TBD Spring 2011; tentatively planned to be held at FMC in Pasadena, TX (Houston area)
July 2010
NA Liquid Chemicals

6. Notable / New Activities
Statistical Methods Task Force
Two new activities related to particle counters:
Cross-calibration (how to take counts from one counter and predict what another counter will give)
Extrapolation (a way to use particle counts from a particular counter across all the reported channels to predict counts at channels less than the lowest size on the given counter)
Planning to develop new documents for each activity
New participants are welcome; please contact Ian McLeod or Bob Brill (ICL)
July 2010
NA Liquid Chemicals

7. Ballot Results Approved/forwarded for procedural review
4953
Revision of SEMI F , Guide for Ultrapure Water Used in Semiconductor Processing
July 2010
NA Liquid Chemicals

8. New TFOFs/SNARFs
5105
New Standard: Guide for Cross Calibrating Particle Measurement Instruments for Liquid Chemicals
Statistical Methods TF
5106
New Standard: Guide for Extrapolating Particle Measurement Data for Liquid Chemicals
July 2010
NA Liquid Chemicals

9. Upcoming Ballots Cycle 1-2011 and later
Revision of SEMI F , Guide for Ultrapure Water Used in Semiconductor Processing
Surface Area of Polymer Pellets TF
In addition, the following documents are being reviewed, and have been authorized to be balloted for reapproval if no issues with the existing content are identified:
SEMI C , Guideline for Boron Tribromide
SEMI C , Specification for Dichloromethane (Methylene Chloride)
SEMI C , Specification and Guideline for Hexamethyldisilazane (HMDS)
SEMI C , Specifications and Guidelines for Hydrofluoric Acid
SEMI C , Specification for Methyl Ethyl Ketone
SEMI C , Specification and Guideline for Mixed Acid Etchants
SEMI C , Specification for Phosphoric Etchants
SEMI C , Guideline for Phosphorus Oxychloride
SEMI F18-95, Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
SEMI F , Guide for Bulk Chemical Distribution Systems
July 2010
NA Liquid Chemicals

10. Task Force Reports Analytical Methods TF F57 Rewrite TF
TF is continuing 5-year review activities.
F57 Rewrite TF
Activity on Method for Determining Surface Roughness In Polymer Components Used In Ultrapure Water and Liquid Chemical Distribution Systems is in progress.
F63 Revision TF
Document 4953 approved and submitted for procedural review.
Surface Areas of Polymer Pellets TF
Document 4556A to be issued for balloting in Cycle
Statistical Methods TF
See “Notable/New Activities” (slide 6)
July 2010
NA Liquid Chemicals

11. Regional Staff Contact Information
Name
Ian McLeod
Phone
Office
SEMI HQ, San Jose, CA
Committees etc.
Compound Semiconductor Materials Environmental, Health, and Safety Flat Panel Display Liquid Chemicals Metrics Physical Interfaces & Carriers Membership
July 2010
NA Liquid Chemicals