1. North America Information & Control Committee
I&CC Liaison Report
Japan Standards Spring 2009 Meetings
2/17/2019

2. Leadership Changes Sensor Actuator Bus Subcommittee: PCS Task Force:
Dan Judd (Arlington Laboratory) has resigned as subcommittee chair
Rich Gwizdak (Canton Control Solutions) has been appointed as new subcommittee co-chair, serving with James Moyne (AMAT)
PCS Task Force:
Hazem Hajj (Intel) has resigned as task force leader
Chris Maloney (Intel) has been appointed as new TF leader, serving with James Moyne (AMAT)
2/17/2019

3. Leadership Committee Co-chairs Technical Architects
David Bricker / Semitool
Jack Ghiselli / Ghiselli Consulting
Lance Rist / ISMI
Technical Architects
Gino Crispieri / ISMI
2/17/2019

4. Current Committee Structure
Information & Control
Committee
Sensor Actuator Bus Subcommittee
Recipe and Parameter (RaP) Management TF
Sunset ►
Diagnostic Data Acquisition (DDA) TF
Int’l Equipment Engineering (IEE) TF
Vacuum Pump SDM TF
Sunset ►
XML NCS E54 TF
Sort Map TF
XML & Web-based Communication TF
I&CC Standards Improvement TF (SITF)
Process Control Systems (PCS) Architecture TF
Data Quality (DQ) TF
AMHS IBSEM TF
GEM 300 TF
2/17/2019

5. Meeting Information Last meeting Next meeting
April 2, 2009 for NA Spring Meetings
Milpitas, California
Next meeting
July 15, 2009 for SEMICON West
San Francisco, California
2/17/2019

6. Document Review Summary Cycles 1 & 2
Superclean
Passed as Balloted
Passed with Editorial Changes
Failed – Returned to Task Force
- - -
4410C-LI1
4410C-LI2
4626A
4685-LI1
4685-LI3
4685-LI4
4685-LI5
4685-LI6
4686
4685-LI2
4729
Cycle 1
E87 Revs
Cycle 2
E125.x, E134.x, E138 Revs
E139.x Revs
E40 & E5 Revs
2/17/2019

7. Yellow Ballots to be reviewed at SEMICON West 2009 Meetings [1/2]
* Voting Period – Cycle 4 *
Document #
Document Title
Task Force
4507A
Revisions to SEMI E133, Provisional Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS). Line item changes and enhancements to E133.1: Fault Detection XML Schema Enhancements and updates to E133.1 base schema as necessary
PCS TF
4596
Revisions to:
• SEMI E128, Provisional Specification for XML Message Structures
• SEMI E125.1, Specification for SOAP Binding for Equipment Self Description (EqSD)
• SEMI E132.1, Specifcation for SOAP Binding for Equipment Client Authentication and Authorization (ECA)
• SEMI E134.1, Specification for Soap Binding of Data Collection Management (DCM)
• SEMI E147, Guide for Equipment Data Acquisition (EDA)
DDA TF
4693
Revision to SEMI E133, Provisional Specification for Automated Process Control Systems Interface. Line item changes to E133 to provide specification for wafer to wafer (W2W) control.
4743
New Standard: Specification for Communication of Data Quality
Data Quality TF
4744
Revision to SEMI E148, Specification for Time Synchronization and Definition of the TS-Clock Object
2/17/2019

8. Yellow Ballots to be reviewed at SEMICON West 2009 Meetings [1/2]
* Voting Period – Cycle 4 *
Document #
Document Title
Task Force
4745
Reapproval of SEMI E54.13, Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM)
NA I&C Committee
4746
Reapproval of SEMI E91, Specification for Prober Specific Equipment Model (PSEM)
4747
Reapprovals for SEMI E122, Standard for Tester Equipment Specific Equipment Model (TSEM) and SEMI E122.1, Specification for SECS-II Protocol for Tester Specific Equipment Model (TSEM)
4748
Reapprovals of SEMI E123, Standard for Handler Equipment Specific Equipment Model (HSEM) and SEMI E123.1, Specification for SECS-II Protocol for Handler Specific Equipment Model (HSEM)
4749
Reapprovals of SEMI E39, Object Services Standard: Concepts, Behavior, and Services and SEMI E39.1, SECS-II Protocol for Object Services Standard (OSS)
4750
Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS)
4751
Withdrawals for SEMI E58, Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services and SEMI E58.1, SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
2/17/2019

9. Task Force Updates Sensor Actuator Bus SC Data Quality TF
Vacuum Pump TF and XML NCS E54 TF have been disbanded
Data Quality TF
New SNARF’s :
(4743) Communication of Data Quality
(4744) E148 revision (time synchronization)
2/17/2019

10. Task Force Updates [continued]
Diagnostic Data Acquisition (DDA) TF
Revised SNARF for E128 / E125.1 / E132.1 / E134.1 / E147 revisions (4596)
GEM300 TF
New SNARF for Recipe Execution Tracking (4742)
TF and co-chairs in discussion with Korea Factory Automation WG on error codes for recipe parameter problems
Discussion may result in SNARF proposal
2/17/2019

11. Task Force Updates [continued]
Process Control Systems (PCS) TF
Revised E133 SNARFs and planned ballot submission for West 2009:
Fault Prediction Enhancements
Wafer-to-wafer control
Recipe and Parameter (RaP) TF
Monitoring DDA TF efforts on SOAP updates. Once completed, then plan E139 updates.
No meeting planned for SEMICON West.
2/17/2019

12. Task Force Updates [continued]
International Equipment Engineering (IEE) TF
Plan to sunset at West 2009
Previously planned to be replaced by NGF (Next Generation Factory) TF. However, NGF discussion being pushed back because of economic conditions
Standards Improvement Task Force (SITF)
May revive TF if there is a need, otherwise issues will be raised directly to NA I&C Committee
XML Task Force
Working with other task forces needing help on XML
2/17/2019

13. NA I&C Standards due for 5-Year Review [1/2]
Reapproval ballots for SEMICON West:
E54.13 (Ethernet/IP)
E91 (PSEM)
E122 / E122.1 (TSEM)
E123 / E123.1 (HSEM)
E39 (Object Services)
Withdrawal ballots for SEMICON West:
E37.2 (High-speed SECS message services)
E58 / E58.1 (ARAMS)
2/17/2019

14. NA I&C Standards due for 5-Year Review [2/2]
“In Limbo” documents to be discussed further via I&C GCS:
E32 / E32.1 (material movement)
E41 / E41.1 (exception management)
E86 (CIM framework factory labor)
E105 (CIM framework scheduling)
E107 (electric failure, yield management)
2/17/2019

15. NA I&CC West 2009 Meeting Schedule [DRAFT]
San Francisco Marriott Hotel
Sunday, July 12
SITF (3:00 PM – 6:00 PM, if meeting)
Sort Map (3:00 PM – 6:00 PM, if meeting)
Monday, July 13
I&C GCS (8:00 AM – 9:30 AM)
I&C Leadership (9:30 AM – 11:00 AM)
GEM300 (11:00 AM – 6:00 PM)
Data Quality (11:00 AM – 3:00 PM)
PCS (3:00 PM – 6:00 PM)
Tuesday, July 14
DDA (8:00 AM – 11:00 AM)
AMHS (8:00 AM – 11:00 AM)
XML (11:00 AM – 3:00 PM)
Sensor Bus (11:00 AM – 3:00 PM)
IEE (3:00 PM – 6:00 PM)
Wednesday, July 15
I&C Committee (8:00 AM – 5:00 PM)
Committee meeting on Wednesday
2/17/2019

16. Thank You!
For more information or participate in any NA I&C activities, please contact Paul Trio at SEMI
2/17/2019