1. Optical setup & MEMS simulations
Jayan Ozhikandathil
Supervisor: Prof. Yves-Alain Peter
Laboratary for Micro and Nanosystems
Département de génie physique - Polytechnique Montréal

2. Introduction
Measurements:
Reflection and transmission spectra with normal incidence of white light
Reflection and transmission spectra analysis as a function of angle of incidence
Optical setup includes:
A broad band source
Spectroscopy instrument
High resolution
Optical components

3. Characterisation setup
camera 2
camera 1
flip
mirror
lens
lens
iris
detector
source
flip
mirror
beam
splitter
sample
polariser
Measurements
Reflection
Transmission
Angular dependence

4. Microscope objective (58373)
UTR 120 Newport
562 xyz Newport
UMR Newport
Microscope objective
XYZ stage
XYZ stage
XYZ stage
Rotation stage
Microscope objective (58373)
Metal (steel )block
Metal (steel )block
Single axis stage

5. Reflection spectrum as function of θs
sample θi s
2θs D
sample
rotation θr

6. Optical setup: future tasks
Realization of complete setup
Measurements of transmission, reflection spectra and angular dependence on it.
Studies on polarization dependence on spectra
Behavior of QD emission on PhC Slab
Behavior of QD emission with lateral and vertical tuning of double layer PhC
Behavior of QD emission with vertical tuning of single layer PhC

7. MEMS for the tuning of Photonic crystal
Tuning of optical properties of PhC slabs can be achieved in a double layer PhC arrangement
SiN
SiO2 Si + -
SiN
SiO2 Si ~
Lateral tuning
Vertical tuning

8. MEMS actuator design using CoventorWare
1. Lateral Tuning
Undesirable effects due to levitation effects in fields in the vertical axis ~20nm upward movement noticed
Displacement vs. voltage

9. MEMS Lateral tuning…
2. Lateral tuning
Negligible upward movement

10. Single slab Vertically tunable PhC

11. +Ve
Single slab tunable PhC Process

12. Future tasks on MEMS design
Integration of vertical and lateral tuning in a single design
Design of suitable flexures which supports the vertical and later actuation

13. Thank you!