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EE201C Chapter 3 Interconnect RLC Modeling
Prof. Lei He
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Chapter 3 Interconnect RLC Modeling
Table and formula based capacitance extraction Table and formula based inductance extraction RC or RLC circuit model generation
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Reading Assignments J. Cong, L. He, A. B. Kahng, D. Noice, N. Shirali and S. H.-C. Yen, "Analysis and Justification of a Simple, Practical 2 1/2-D Capacitance Extraction Methodology", ACM/IEEE Design Automation Conference, June 1997, pp L. He, N. Chang, S. Lin, and O. S. Nakagawa, "An Efficient Inductance Modeling for On-chip Interconnects", (nomination for Best Paper Award)IEEE Custom Integrated Circuits Conference, San Diego, CA, pp , May 1999. M. Xu and L. He, "An efficient model for frequency-based on-chip inductance," IEEE/ACM International Great Lakes Symposium on VLSI, West Lafayette, Indiana, pp , March 2001.
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Capacitance Extraction
Introduction Table lookup method Formula-based method
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What’s Capacitance? Simplest model: parallel-plate capacitor +Q -Q
++ ++ Simplest model: parallel-plate capacitor It has two parallel plates and homogeneous dielectric between them The capacitance is permittivity of dielectric A area of plate d distance between plates The capacitance is the capacity to store charge charge at each plate is one is positive, the other is negative
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General Picture c12 m2 m1 c23 c13 m3
For multiple conductors of any shapes and materials, and in any dielectric, there is a capacitance between any two conductors Mutual capacitance between m1 and m2 is C12 = q1/v2 q1 is the charge of m1 v1 =0 and v3 = 0
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Capacitance Matrix m1 m3 m2 c23 c13 c12 C = -c21 c22 -c23 -c31 -c32
Capacitance is often written as a symmetric matrix m1 m3 m2 c23 c13 c12 C = -c21 c22 -c23 -c31 -c32 c33 c11 -c12 -c13 is the self-capacitance for a conductor e.g., c11 =c12+c13 The charge is given by e.g.,
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Application in VLSI Circuits
Conductors: metal wire, via, polysilicon, substrate Dielectrics: SiO2 ,... Total cap for a wire delay, power Mutual cap between wires signal integrity
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Characteristics of Coupling Capacitance
Coupling capacitance virtually exists only between adjacent wires or crossing wires Cx Capacitance can be pre-computed for a set of (localized) interconnect structures
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2.5D Capacitance Extraction [Cong-He-Kahng-et al, DAC’97]
Propose and validate five foundations to simplify capacitance extraction Develop a simple yet accurate 2.5D capacitance extraction
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Verification of Foundations
Method: 3D analysis by FastCap [Nabors-White, TCAD’91] Geometrical parameters: process [NTRS’94] 3.0 2.5 1.0
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Key Factor to Enable Foundations
Minimum metal density requirement Metals occupy > 30% area on anywhere on routing layer Foundry may introduce dummy metals for metal sparse areas dummy metal
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Foundation I Effect of Ground and Neighbors
Both ground, and neighboring wires on the same layer, have significant shielding effects. Thus, both must be considered for accurate modeling.
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Shielding Effect of Ground and Neighbors
layer i Ci,i Ci,i-2 no GND 458.4 130.1(28.4%) layer i-2 Ci,i lumped capacitance for victim on layer i Ci,i-2 coupling between victim and aggressor on layer i-2
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Shielding Effect of Ground and Neighbors
layer i Ci,i Ci,i-2 no GND 458.4 130.1(28.4%) + GND 486.6 79.49(16.3%) layer i-2 Ci,i lumped capacitance for victim on layer i Ci,i-2 coupling between victim and aggressor on layer i-2
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Shielding Effect of Ground and Neighbors
layer i Ci,i Ci,i-2 no GND 458.4 130.1(28.4%) + GND 486.6 79.49(16.3%) + neighbors 1428 24.77(1.8%) layer i-2 Ci,i lumped capacitance for victim on layer i Ci,i-2 coupling between victim and aggressor on layer i-2
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Foundation II Coupling between Layers i and i-2
Coupling between wires on layer i and wires on layers i-2 is negligible when the metal density on layer i exceeds a certain threshold.
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Coupling between Layers i and i-2
layer i layer i-1 layer i-2 -- 2x 4x 8x 12x Ci,i Ci,i-2 Ci,i lumped capacitance for victim on layer i Ci,i-2 coupling between victim and aggressor on layer i-2
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Foundation III Coupling Effect of Layers i+2 and i-2
During capacitance extraction for wires on layer i, layers i+2 and i-2 can be treated as ground planes with negligible error. There is no need to look beyond layers i+2 and i-2.
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Coupling Effect of Layers i+2 and i-2
Ci,i 418.9 Ci,i+1 52.35 Ci,i-1 52.26 Ci,i lumped capacitance for victim on layer i Ci,i+1 coupling between victim and central crossover on layer i+1 Ci,i-1 coupling between victim and central crossunder on layer i-1
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Coupling Effect of Layers i+2 and i-2
Ci,i Ci,i+1 Ci,i-1 Ci,i lumped capacitance for victim on layer i Ci,i+1 coupling between victim and central crossover on layer i+1 Ci,i-1 coupling between victim and central crossunder on layer i-1
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Foundation IV Coupling Effect of Neighbors
Coupling analysis to wires on the same layer need only consider nearest neighbors independently, with the widths of same-layer neighbor wires having negligible effect on the coupling.
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Effect of Non-immediate Neighbors
victim layer i Cl Cr Ci,i 1436 C l 616.6 Cr 616.5 Ci,i: lumped capacitance for victim.
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Effect of Non-immediate Neighbors
victim victim layer i Cl Cr Cl Cr Ci,i (0%) C l (+3%) Cr (+3%) Ci,i: lumped capacitance for victim.
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Effect of Neighbor Widths
layer i victim w W Ci,i Ci,i varies less that 0.3% for different neighbor widths.
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Independence of Neighbors
2 victim (S1,S2) (1,2) (1,3) (1,4) (1,) lhs rhs Ci,i differs less than 1.0%.
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Foundation V Interaction between Layers i-1 and i+1
The joint interaction of layers i-1 and i+1 on layer i is negligible; therefore, corrections for orthogonal crossovers and crossunders can be performed independently.
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Independence of Crossovers and Crossunders
layer i+2 i+1 i i-1 couplings between victim and crossunders No crossover
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Independence of Crossovers and Crossunders
layer i+2 i+1 i i-1 couplings between victim and crossunders No crossover Full of crossovers
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Independence of Crossovers and Crossunders
layer i+2 i+1 i i-1 couplings between victim and crossunders No crossover Full of crossovers
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Table-Based 2.5D Capacitance Extraction
Table (Cap coefficients) generation One-time use of 3-D method Capacitance computation table lookup with linear interpolation and extrapolation
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Table Generation for Lateral, Area and Fringe Capacitances
layer i w s s Functions of (w,s) Pre-computed for per-side per unit-length
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Table Generation for Crossing Capacitances
w s sc wc layer i Function of (w,s,wc,sc)
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Table Generation for Crossing Capacitances
sc wc wc sc sc w w Ci,i Per-corner Cover(w,s,wc,sc) = 4
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Illustration of Capacitance Computation
victim Compute the lumped cap for victim
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Find Nearest Neighbors on Same Layer
victim
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Add in Per-Side Area, Fringe and Lateral Capacitances
victim w S1 L1 Per-side area capacitance = CA(w,s1) * L1 Per-side fringe capacitance = CF(w,s1) * L1 Per-side lateral capacitance = CL(w,s1) * L1
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Add in Per-Side Area, Fringe and Lateral Capacitances
victim
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Find All Crossovers and Crossunders
victim
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Add in Crossing Capacitances Corner-by-Corner
victim S1 wc sc w One-corner crossover correction = Cover(w,S1,wc,sc)
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Add in Crossing Capacitances Corner-by-Corner
victim S1 wc w One-corner crossover correction = Cover(w,S1,wc,)
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Add in Crossing Capacitances Corner-by-Corner
victim S1 wc w One-corner crossover correction = Cover(w,,wc,)
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Add in Crossing Capacitances Corner-by-Corner
victim wc sc w One-corner crossover correction = Cover(w,,wc,sc)
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Summary of Capacitance Computation
Find nearest neighbors on the same layer Add in per-side lateral, area and fringe capacitances w.r.t. each neighbor Find all crossovers and crossunders Add in crossing capacitances corner-by-corner w.r.t. each crossover and crossunder Sum of capacitance components in above steps is the lumped capacitance of the victim.
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Good match in terms of lumped capacitance!
Experimental Results 2 1/2-D 3-D Error net1 pF 6.5713pF -0.54% net2 pF pF -3.33% Good match in terms of lumped capacitance!
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Formula based on horizontal and vertical parameters
[Sakurai-Tamaru,ED’83][Wu-Wong-et al, ISCAS’96] single line parallel lines …...
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Single Line [Sakurai-Tamaru,ED’83]
w t Ff Ff h Fp Unit-length cap Error less than 6% when
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Single Line of Length L [Sakurai-Tamaru,ED’83]
w t h Line of length L
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Parallel Lines on Same Layer [Sakurai-Tamaru,ED’83]
w s w t h Unit-length cap Error less than 10% when
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Parallel Lines on Same Layer [Wu-Wong-et al, ISCAS96]
h Unit-length cap Recall [Sakurai-Tamaru,ED’83]
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Noramlzied space (s/h)
Comparison 6 numerical Wu-Wong-et al 5 Sakurai Normalized cap (C/) W=1.05um 4 W=0.7um 3 1 2 3 4 15 Noramlzied space (s/h) [Wu-Wong-et al] is better in smaller width and spacing
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Parallel Lines within Two Grounds [Wu-Wong-et al, ISCAS96]
Two grounds where One ground
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