1. North America Liquid Chemicals Committee
Liaison Report
April 2012
NA LChem Report - April 2012

2. Outline New TFOFs and SNARFs Leadership Organization Chart
Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
NA SEMI Standards Staff Change
NA LChem Report –April 2012

3. New TFOFs and SNARFs TFOFs SNARFs None.
Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing (#5415)
Revision of SEMI F , Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems (#5416)
NA LChem Report - April 2012

4. Leadership Committee Co-chairs Frank Flowers / FMC Frank Parker / ICL
NA LChem Report - April 2012

5. Current Committee Structure
NA LChem Report - April 2012

6. Meeting Information Last meeting Next meeting
April 03, NA Spring 2012 Meetings SEMI Headquarters, San Jose, CA
Next meeting
July 10, SEMICON West San Francisco Marriott Marquis Hotel, San Francisco, CA
NA LChem Report - April 2012

7. Document Review Summary Cycle 1-2012 [1/3]
Document Title
Committee Action
4543A
Revision to SEMI C , Specification and Guidelines for Ammonium Fluoride 40%, with title change to: Specification and Guide for Ammonium Fluoride 40%
Passed as balloted
4544C
Revision to SEMI C , Specification for n-Butyl Acetate
Failed and reballoted
4547C
Revision to SEMI C , Specifications for n-Methyl 2-Pyrrolidone
NA LChem Report - April 2012

8. Document Review Summary Cycle 1-2012 [2/3]
Document Title
Committee Action
5191A
Revision to SEMI C , Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants
Failed and reballoted
5193
Revision to SEMI C , Guideline for 25% Tetramethylammonium Hydroxide, with title change to: Guide for 25% Tetramethylammonium Hydroxide
Passed as balloted
5299A
Revision of SEMI C with title change to: Specification and Guide for Hexamethyldisilazane (HMDS)
NA LChem Report - April 2012

9. Document Review Summary Cycle 1-2012 [3/3]
Document Title
Committee Action
5354
Revision to SEMI C , Guideline for Trans 1, 2 Dichloroethylene with title change to: Guide for Trans 1, 2 Dichloroethylene
Passed as balloted
5355
Revision to SEMI C , Specification and Guideline for 1,1,1-Trichloroethane, Furnace Grade with title change to: Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade
5356
Revision to SEMI C , Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes
Failed and reballoted
NA LChem Report - April 2012

10. Technical Ballots to be reviewed at SEMICON West 2012
Document #
Document Title
TF / SC
Cycle 3 or Cycle 4, 2012
4544D
Revision to SEMI C , Specification for n-Butyl Acetate
Analytical Methods TF
4547D
Revision to SEMI C , Specifications for n-Methyl 2-Pyrrolidone
5188
New Standard: Guide to Evaluate the Performance of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems
UPW Filtration Efficiency TF
NA LChem Report - April 2012

11. Technical Ballots to be reviewed at SEMICON West 2012 [continued]
Document #
Document Title
TF / SC
Cycle 3 or Cycle 4, 2012
5191B
Revision to SEMI C , Specification and Guideline for Mixed Acid Etchants, with title change to: Specification and Guide for Mixed Acid Etchants
Analytical Methods TF
5299B
Revision of SEMI C with title change to: Specification and Guide for Hexamethyldisilazane (HMDS)
5356A
Revision to SEMI C , Specifications and Guidelines for Xylenes with title change to: Specifications and Guide for Xylenes
NA LChem Report - April 2012

12. Task Force Updates Analytical Test Methods TF Statistical Methods TF
Reviewing documents for 5 year review
SEMI C27, Specifications and Guidelines for Hydrochloric Acid
SEMI C31, Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v)
SEMI C35, Specifications and Guideline for Nitric Acid
SEMI C36, Specifications for Phosphoric Acid
Statistical Methods TF
Considering to disband at SEMICON West if there is no further interest on existing TF discussions (e.g., ship-to-control)
NA LChem Report - April 2012

13. Task Force Updates [continued]
F57 Revision TF
Ballot 4555A passed technical committee and procedural reviews and is now published as SEMI F
Possible further alignment of F57 with ITRS (International Technology Roadmap for Semiconductors ) risk factors, to be discussed at next meeting during SEMICON West 2012
F104 Revision TF
Newly approved SNARF # 5416
Revision of SEMI F , Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
NA LChem Report - April 2012

14. Task Force Updates [continued]
Polymer Surface Roughness TF
Continue drafting of ballot 4989
New Standard: Test Method for Determining Surface Roughness in Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
UPW Filtration Efficiency TF
Continuing development of Doc Ballot submission planned for Cycle 4, 2012
New Standard: Guide for Validation of the Efficiency of Final Filtration in Ultrapure Water Production Used in Semiconductor Processing
NA LChem Report - April 2012

15. Task Force Updates [continued]
F63 Revision TF
New SNARF # 5415
Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing
F31, F39, and F41 Rewrite TF
TFOF revised to include F31
Will look into the following documents due for 5-Year Review:
SEMI E49.2, Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
SEMI E49.4, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
SEMI E49.5, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
SEMI E49.7, Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
NA LChem Report - April 2012

16. Proposed Meeting Schedule at SEMICON West 2012
Monday, July 9
F104 Rewrite TF (1:00 PM to 2:00 PM)
F39, F31& F41 Rewrite TF (2:00 PM to 3:00 PM)
Polymer Surface Roughness TF (3:00 PM to 4:00 PM)
UPW Filtration TF/ F63 TF (4:00 PM to 5:00 PM)
Tuesday, July 10
F57 Discussion/ITRS Alignment (8:00 AM to 10:00 AM)
Analytical Methods TF (10:00 AM to 12 Noon)
Liquid Chemicals Committee (1:00 PM to 4:00 PM)
NA LChem Report - April 2012

17. NA Standards Staff Changes
New NA Standards staff: Michael Tran
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: NARSC / I&C / ATE / EHS / HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Kevin Nguyen
Manager, NA Standards Committees
Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability
Standards Website
Michael Tran
Senior Standards Engineer
Committees: Compound Semiconductor Materials / FPD / Liquid Chemicals / MEMS / Metrics / Microlithography / PIC
Standards Membership
NA LChem Report - April 2012

18. Thank You!
For more information or participate in any NA Liquid Chemical activities, please contact Michael Tran at SEMI
NA LChem Report - April 2012