1. 个人简历 美国大学工程学学士、硕士、博士 美国德州电子仪器公司芯片测试工程师，芯片生产工程师，开发部经理。 美国阿肯色大学电子工程学教授。
发表论文170多篇。
完成多项研究项目，价值超过美金1500万。

2. 个人简历 博士生导师，指导过65位博士和硕士生。 获得伦敦城市行业教育学会的“CGIA”文凭。
写了关于开关电源技术方面的书一本，书名为“Power Switching Converters”
美国电解化学协会委员。
微电子封装研究所主任。

3. University of Arkansas

4. Micro-Electro-Mechanical Devices Simon S
Micro-Electro-Mechanical Devices Simon S. Ang Professor of Electrical Engineering University of Arkansas USA

5. What is Micro-Electromechanical Device or MEMs?
Imagine machines so small they are imperceptible to the human eye.
Imagine working machines with gears no bigger than a grain of pollen.

6. What is MEMS?
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate using micro-fabrication technology.

7. MEMS Applications
Air Bag Sensor - crash-bag deployment in automobile (accelerometer)
Ink Jet Printer
Bio-MEMS – Polymerase Chain Reactor (PCR) for DNA amplification and identification

8. (From Silicon Design Inc.,)
MEMS Accelerometer
Automotive --  Testing, Suspension, Air Bags Agricultural --  Harvesting shock & vibration, Production line monitoring Manufacturing -- Testing, Production line monitoring, Shipping monitoring Transportation  --  Rail-car sensing, Shipping monitoring, Testing Down Hole Drilling -- Tilt/Attitude sensing, Machinery health NASA -- Vibration Monitoring, Testing
(From Silicon Design Inc.,)

9. A Portable PCR Device Biological Detection Technology for Counter – Terrorism (Lawrence Livermore Laboratory)

10. Sandia’s Micro-Mirror

11. Spider Mite on a Sandia’s Micro-Mirror

12. Spider Mite Approaching a Sandia’s Micro-Gear Assembly

13. Micro Spacecrafts

14. Microthruster

15. Microcombustion testing
Microthruster
Microcombustion testing

16. Microthruster
Microthruster firing sequence

17. Basic Surface Micromachining Process Sequence
I. Deposit Sacrificial Layer
IV. Pattern Mechanical Layer
II. Pattern Sacrificial Layer
V. Release Mechanical Layer +V
III. Deposit Mechanical Layer
VI. Test Device

18. Microelectronic Fabrication
Photomask
Fabricated Devices

19. Processing Equipment

20. Processing Equipment

21. Processing Equipment

22. Processing Equipment

23. Processing Equipment

24. Processing Equipment

25. Processing Equipment

26. Aluminum Wire Bonder

27. Gold Wire Bonder

28. Wire Bond Pull Tester

29. Measurement Equipment

30. Microelectronic Cleanroom Operation

31. Microelectronic Cleanroom Operation

32. Microelectronic Cleanroom Operation

33. Microelectronic Cleanroom Operation

34. Microelectronic Cleanroom Operation

35. Microelectronic Cleanroom Operation

36. Wire Bonding

37. Microfluidic Devices
Microfluidic devices are MEMS devices with micro-scale (10-6m) or nano-scale (10-9m) flow channels
They come with valves, electrodes, heaters, and other features
These microfluidic devices can be used as tiny chemical processing or reaction system, consuming only tiny amount of chemical – micro-TAS (micro total analysis system)

38. Post-type Filter

39. Comb-Type Filter

40. Weir-type Filter
Glass cover
Silicon plate
Inlet
Outlet
50µm

41. Weir-type Filter
50µm

42. In Chip Immunofluorescent Cell Detection
Glass cover
Labeling
Detection
Fluorescent Microscope
Silicon Plate
Cell
Fluorescent labeled antibody
Labeled cell

43. Beads in the Microchannels
Deep channel (before filter chamber)
Shallow channel (After filter chamber)

44. Confocal Images of Microchannel
Shallow channel
Deep Channel

45. Fluent Simulations of Microfilter Chip
1μm weir gap
Flow rate=2 mm/s
3μm weir gap
Flow rate=2mm/s
6μm weir gap
Flow rate=2mm/s
9μm weir gap
Flow rate=2mm/s

46. Fluent Simulations of Microfilter Chip
1μm weir gap
Depth=30μm
Depth=10μm
50µm
Flow rate=0.5mm/s
Depth=50μm
Flow rate=1mm/s

47. Labeling efficiency along the weir

48. Trapping Efficiency

49. Comparison with the conventional detection on slides
9 steps
Takes more than 1 h
Consumes 20µl cells solution and 25 µl labeling reagent
Within filter chip
3 steps
Takes less than 0.5h
Consumes 2 µl cells solution and labeling reagent

50. Pillar-Type Microfludic Filter Chip

51. Future work Next generation chip: Comb-type chip Multiplex
Application in DNA array
Application in ELISA
Incorporate QD

52. Other Related Work Quantum dot labeling Bacteria sensors Brain probes
Recording integrated circuitries
Microelectronics Packaging

53. Quantum Dots Detection System

54. Quantum Dots Labeling of C. parvum (red) and G. Lamblia (Green)
“Quantum Dots as a Novel Immunofluorescent Detection System for Cryptosporidium parvum and Giardia lamblia,” L. Zhu, S. Ang, & Wen-Tso Liu, in Applied and Environmental Microbiology.
Quantum dots labeling of multiple pathogens: Semiconductor quantum dots conjugated antibodies were successfully developed to label Cryptosporidium parvum and Giardia lamblia. This novel fluorescence system exhibited superior photostability, gave folds higher signal to noise ratios than traditional organic dyes in detecting C. parvum, and allowed dual-color detection for C. parvum and G. lamblia. (to be published in Environmental and Applied Microbiology).
Interdigitated electrode sensor for E-coli detection: The sensing electrode senses the presence of e-coli bacteria by its change in impedance across the electrode.

55. Interdigitated Electrode Sensor
Quantum dots labeling of multiple pathogens: Semiconductor quantum dots conjugated antibodies were successfully developed to label Cryptosporidium parvum and Giardia lamblia. This novel fluorescence system exhibited superior photostability, gave folds higher signal to noise ratios than traditional organic dyes in detecting C. parvum, and allowed dual-color detection for C. parvum and G. lamblia. (to be published in Environmental and Applied Microbiology).
Interdigitated electrode sensor for E-coli detection: The sensing electrode senses the presence of e-coli bacteria by its change in impedance across the electrode.

56. What is a Bio-Sensor? Biologically sensitive Material
Antibodies
Enzymes
DNA Probes
Transducing Element/System
Electrochemical
Optical
mass
Direct
Interfacing
Fluorescent
Chemiluminescent
Enzymatic substrate
Indirect

57. E-coli Sensing Principle
Charge transfer is blocked
Fe[(CN)6]3-/4-
E. coli O157:H7 cells
Streptavidin
Self Assembled Monolayer
Au Electrode

58. Scanning Electron Micrograph of E-Coli on Bio-Sensor
E-coli cells on the surface of bio-sensor before washing away non-specific binding - 65 x 100 μm window size
1000 X Magnification

59. Surface of Electrode (AFM)

60. Brain Sensors Multi-site potential and chronoamperometry brain probes
Neural Signal Recording Electrodes
Nano Interdigitated Array Electrochemical Recording Electrode
Potential Electrode
We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

61. Brain Sensors
A brain probe mounted and wire bonded on a circuit board carrier
We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

62. Brain Sensors
SEM Photo of a multi-site potential and chrono-amperometry brain probe
We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

63. Brain Sensors
SEM Photo of a multi-site potential and chrono-amperometry brain probe
We have developed the brain probes for the last 12 years. The main objectives of these brain probes are to study the brain electrical (such as neuronal spikes when brain is active!) and chemical activities (such as dopamine). Our novel brain probes are able to perform combined potential and chemical sensing simultaneously.

64. Silicon Microprobe Process Flow

65. Silicon Microprobe Process Flow

66. Brain Probe Recording in Rat’s Brain

67. Extracellular Field Potentials in Olfactory Bulb of A Male Rat
Match in evoked potential amplitude and waveform across the four recording sites when occupying the same position in the olfactory bulb
Sharp reversal of polarity as each recording site across the mitral cell later, indicating that crosstalk between channels is minimal.
Stainless steel microwires - 100µm diameter, enamel-insulated
16-site brain microprobe

68. Recording Integrated Circuit

69. Microelectronic Packaging

70. Microelectronic Packaging

71. Microelectronic Packaging

72. Microelectronic Packaging

73. Microelectronic Packaging

74. Thank You
Questions ?