1. Al-Azawi, Anas Fahad Berdova, Maria Jannatul, Susoma Mutanen, Ilkka Key Issues In Purchasing DRIE system

2. Conduct active interdisciplinary research - Choosing the device Foundation of innovation and research Aalto/VTT DRIE system from a reliable supplier that demonstrate the ability to supply, implemet and provide continued customer service. LAM, Oxford, STS,... Applications: Type of devices to be manufactured Relevant tools to be purchased Main Goal Initial Phase : 1. week – 2. week

3. Conduct active interdisciplinary research - Choosing the device Main Goal Initial Phase : 2. week – 3. week Logistics Technical - Licenses -Allowence to disclose technical information through publication -Price -Cost of ownership -Delivery -Involving Aalto/VTT stuff and assigning jobs -Asking for quotation -Financial department -Contract -Cryo or Bosch -Aspect ratio -Selectivity to PR -Etech rates -Sidewall rouhness -Interface and simplicity of usage -Wafer size -Multiple wafer chuck -Vacuum degree and pump specification -Robotic arm -MFCs -Metal compatibilty in the chamber -Alarms -Pumping time -Load lock

4. Conduct active interdisciplinary research - Infrastructures Main Goal Intermediate Phase : 4. week – 12. week Logistics Technical - Facilitating the placement of the device ( arraging a room for the device to be placed ) -Gases -Gas Alarms - Suppliers -Gas lines maintenance -Collaboraters and industrial partners -Laywers - Signing the contract -Transportation to the final destination -Gas pipes installation -Gases ( Cl2, CF4, SF6, He, N2, Ar) - Waste handling (toxicity) -Waterline -Liquid nitrogen -Preperation for the treatment of the exhaust gases

5. Conduct active interdisciplinary research - Installing and testing the device Main Goal Advanced Phase : 13. week – 24. week Logistics Technical - Software(PC ) -Micronova - Clean room engineer -Main users ( Viktor,Yukka); their connection with the supplier company and their duties after installation -Gas pipes installation -Cooling pipes maintenance - Maintenance interval -Repair/ maintenance -Cost of a single process while the system is running -Amount of users -Know how/ Experience using RIE -Training of the users and generating licenses -Peso and Lims -Safety manuals -Test runs -Gases ( Cl2, C4F8, SF6, He, N2,Ar) -Impurity level -Gas level detection - Only Si ( What is the possiblity of III –V materials) -Compability -Chuck( cleaning and spareparts) - Micro controllers - Helium (leakage rate) - From Flourine to chloride mode - How to change from 4 to 2 - Alarm test