1. NA Facilities and Gases Committees Liaison Report
Updated February 26, 2013

2. Gases Co-chair
Tim Volin - Parker Hannifin

3. Phil Naughton - Applied Materials
Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied Materials

4. Gases Committee C: Tim Volin – Parker Hannifin
Components SC
Mohamed Saleem – Fujikin
Materials & Process SC
Tim Volin – Parker Hann.
Contamination SC
Tim Volin – Parker Hann.
Mass Flow TF
Mohamed Saleem - Fujikin
Materials of
Construction Gas Delivery
Systems TF
Tim Volin – Parker Hann.
Filters & Purifiers TF
Mohamed Saleem – Fujikin
Pressure Measurement TF
Justin Hough – AMAT
David Colquhoun – BriskHeat
Heater Jacket TF
David Colquhoun – BriskHeat
Gas Specifications TF
Mark Ripkowski – CONSCI

5. Facilities Committee C: Phil Naughton – Applied Materials
C: Steve Lewis – CH2M Hill
Building Information Modeling (BIM)
for Semiconductor Capital
Equipment TF
Ben Bruce – Applied Materials
F51 (Elastomer) Revision TF
Dalia Vernikovsky - Applied Seals

6. Meeting Information Last meeting Next meeting
Tuesday, Oct 30, 2012, NA Fall Standards Meeting
SEMI HQ in San Jose, CA
Next meeting
Tuesday, April 2, 2013, NA Spring Standards Meeting
Check for the latest update

7. New SNARFs [1] Gas Specifications TF Mass Flow TF
Doc. 5504, Revision to SEMI E , Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers
Additional gas codes requested
Gas Specifications TF
Doc. 5505, Revision of SEMI C (Reapproved 0211) - Specifications and Guidelines for Hydrogen
Correct table 1 for total ppm

8. New SNARFs [2] Filters and Purifiers TF
Doc. 5516, Reapproval of SEMI F Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
Doc. 5517, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
Doc. 5518, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determining Inert Gas Purifier Capacity
Doc. 5519, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determining Purifier Efficiency
Doc. 5520, Reapproval of SEMI F Test Methods for Transport and Shock Testing of Gas Delivery Systems

9. Ballot Results Summary
Doc. 5443, Line Item Revision of SEMI C3-0812, Specifications for Gases
Passed as balloted, being processed for publication

10. Upcoming Ballots- Cycle 1 & 2, 2013
Doc. 5446, New Standard: Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS)
Doc. 5504, Revision to SEMI E , Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers
Doc. 5505, Revision of SEMI C (Reapproved 0211) - Specifications and Guidelines for Hydrogen
Doc. 5516, Reapproval of SEMI F Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
Doc. 5517, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
Doc. 5518, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determining Inert Gas Purifier Capacity
Doc. 5519, Reapproval of SEMI F (Reapproved 1108) - Test Method for Determining Purifier Efficiency
Doc. 5520, Reapproval of SEMI F Test Methods for Transport and Shock Testing of Gas Delivery Systems

11. Gas Specification TF Gas Specification TF/ Mark Ripkowski (CONSCI)
Drafting
Doc. 5505, Revision of SEMI C (Reapproved 0211) - Specifications and Guidelines for Hydrogen
To correct total impurities for grade 5.5 and 5.7 in table 1
Ballot issued in cycle

12. Components Subcommittee
Mass Flow TF/Mohamed Saleem (Fujikin)
TF is investigating on updating the Ethernet Protocol standards for MFCs

13. Components Subcommittee
Pressure Measurement TF/Justin Hough (Applied Materials) and David Colquhoun (BriskHeat)
Drafting doc. 3440B, New Standard: Test Method For Pressure Transducers In Gas Delivery Systems
Ballot will be issued for cycle for review at SEMICON West meeting

14. Contamination Subcommittee
Filters & Purifiers TF/Mohamed Saleem (Fujikin)
Drafting:
Doc. 5446, Test Method For Determination Of Moisture Dry-Down Characteristics Of Surface-Mounted &Conventional Gas Delivery Systems By Continuous Wave Cavity Ring-Down Spectroscopy (CW-CRDS)
Issued in cycle for review at NA Spring meeting
Doc. 5244B, Revision of SEMI F Classification of Airborne Molecular Contaminant Levels in Clean Environments
TF discussed adding Dimensional specification for Sandwich filters for SEMI F36, Guide for Dimensions and Connections of Gas Distribution Components
Reviewing constraints for 450 mm gas box (height). Contacting OEM (TEL, LAM) for feedback

15. Materials & Processes Subc
Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) [1]
TF is reviewing standards:
SEMI F6-92 Guide For Secondary Containment Of Hazardous Gas Piping Systems
SEMI F Guide For Gas Source Control Equipment
SEMI F14-93 (Reapproved 0699) Guide For The Design Of Gas Source Equipment Enclosures

16. Materials & Processes Subc
Materials of Construction Gas Delivery Systems TF/ Tim Volin(Parker Hannifin) [2]
Drafting:
Doc. 5444, Revision of SEMI F72, Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Payer of Wetted Surfaces of Passivated 316L Stainless Steel Components
Doc. 5445, Revision of SEMI F60, Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

17. Materials & Processes Subc
Heater Jacket TF/David Colquhoun (BriskHeat)
Published SEMI F Guide for Heater Systems Requirements
The TF will start working on a different standard
New Guide for Material with Temperature Range
Concern on heaters have a vapor component emitted while heating, and that is being protested in Europe under Reach standards.

18. Facilities Committee [1]
SEMI F51 Revision Task Force/Dalia Vernikovsky (Applied Seals NA)
Drafting doc. 5080, Revision of SEMI F Guide for Elastometric Sealing Technology
A review of possibilities to ‘assign’ a code of possible levels of acceptance of what o-rings can be suited for ( a rating system ) was proposed
Meeting monthly
End user is encouraged to participate
Progress is being made.

19. Facilities Committee [2]
Building Information Modeling (BIM) for Semiconductor Capital Equipment TF/Ben Bruce (Applied Materials)
A 3-D model will work with multiple different software applications and needs to reflect true dimensions of the semiconductor fabrication tool with its location and interface point.
Drafting doc. 5155, Guide for Building Information Modeling (BIM) for Semiconductor Capital Equipment
Minutes posted on

20. Contact For more information, please contact
Kevin Nguyen at