1. North America Environmental, Health, and Safety (EHS) Committee
December 2011

2. Outline Leadership Organization Chart Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
December 2011
NA EHS Liaison Report

3. Task Force and Leadership Changes
Disbanded Task Force
AMHS Safety TF
December 2011
NA EHS Liaison Report

4. Leadership Committee Co-chairs Technical Architect Technical Editors
Chris Evanston / Salus Engineering
Sean Larsen / LAM Research AG
Eric Sklar / Safety Guru, LLC
James Beasley / ISMI
Technical Architect
Technical Editors
December 2011
NA EHS Liaison Report

5. Organization Chart
North America Environmental, Health, and Safety Committee
Manufacturing Equipment Safety Subcommittee (MESSC)
Disbanded
AMHS Safety TF
S6 Revision TF
Ergonomics (S8) TF
S13 NA Support TF (Inactive)
Fire Protection (S14) TF
S2 3.3 Limitations TF
S18 Support TF
FPD Safety System Liaison TF (Inactive)
S2 Chemical Exposure TF
S22 (Safe Electrical Design) TF
S2 Interlock Reliability TF
Lifting Equipment TF (Inactive)
S25 Revision TF
S2 Ladders & Steps TF
S1 Update TF (Inactive)
Section & Paragraph Symbol WG
S2/Mach. Dir. Mapping TF
S3 Revision TF
S2 Non-Ionizing Radiation TF
December 2011
NA EHS Liaison Report

6. Meeting Information Last Meeting: Next Meeting:
October 27 at NA Standards Fall 2011 Meetings Santa Clara, CA (Applied Materials)
Next Meeting:
April 5 at NA Standards Spring 2012 Meetings [Tentative] San Jose, CA (SEMI Headquarters)
December 2011
NA EHS Liaison Report

7. Published for 1011 * New * Document # Description S28-1011
Safety Guideline for Robots and Load Ports Intended for Use in Semiconductor Manufacturing Equipment (formerly SEMI Draft Document 3560M)
December 2011
NA EHS Liaison Report

8. Published for 0811 * REVISED * Document # Description S26-0811
Environmental, Health, and Safety Guideline for FPD Manufacturing System
(Revisions related to § 8, “Evaluation for Design Review and Inspection”)
* REAPPROVED *
Document #
Description
SEMI S (Reapproved 0811)
Safety Guideline for Multi-Employer Work Areas
December 2011
NA EHS Liaison Report

9. Published for 0611 * REVISED * Document # Description S2-0310c
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
(Delayed Revisions Related to Non-Ionizing Radiation)
S b
Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
(Delayed Revisions related to electrical shock vs burn, transformers)
December 2011
NA EHS Liaison Report

10. Committee Activities Document Review Summary
* Cycle 6 *
Doc #
Description
TC Action
4449C
(2 LIs)
Delayed Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Line Item Revisions related to Work at Elevated Locations and to Removal of Burrs and Sharp Edges
1: FAILED
2: APPROVED
4605E
Line Item Revisions to SEMI S , Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment
Delayed Revisions on Multiple Topics
1: APPROVED
4774B
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation
APPROVED ballots forwarded for Procedural Review
FAILED ballots returned to task force unless noted
December 2011
NA EHS Liaison Report

11. Committee Activities New and Updated TFOFs/SNARFs
New SNARF
(#5357) Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment Delayed Revisions Related to Non-Ionizing Radiation
To continue the efforts of the S2 Non-Ionizing Radiation Task Force as all line items in the last ballot were approved.
December 2011
NA EHS Liaison Report

12. Committee Activities Ballots to be reviewed at NA Spring 2012 Meetings
* Cycle 1 or 2 *
Doc #
Description
TF / SC
5000
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Interlock Reliability and Selection
S2 Interlock Reliability TF
5171
Revision to SEMI S , Safety Guideline for Hydrogen Peroxide Storage & Handling Systems
S25 Revision TF
December 2011
NA EHS Liaison Report

13. Committee Activities Ballots to be reviewed at NA Spring 2012 Meetings
* Cycle 2 *
Doc #
Description
TF / SC
5009
Revisions to SEMI S8-0308, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment (Revisions related to the SESC checklist)
Ergonomics TF
5357
Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Delayed Revisions Related to Non-Ionizing Radiation
S2 Non-Ionizing Radiation TF
5170
Line Item Revisions to SEMI S2-0310, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Revisions Related to Section 3.3
S2 3.3 Limitations TF
December 2011
NA EHS Liaison Report

14. Committee Activities Subcommittees & Task Forces [1/3]
SC / TF
Updates
AMHS Safety TF
TF disbanded.
Ergonomics TF
Ongoing discussions to update the SESC.
Reviewed a proposed new approach to handle use & evaluation.
C2-12 as the earliest possible ballot attempt.
S2 3.3 Limitations TF
Draft revisions created during NA Fall meetings.
Ballot 5170 for C2-12.
S2 Chemical Exposure TF
Continuing work on line items to revise S2 (air sampling, applying S6 definitions). Future discussion: 1 & 25% Thresholds.
S2 Interlock Reliability TF
Ballot 5000 for C1 or C2-12.
S2 / EU Mach. Dir. Mapping TF
Continuing discussions to address machinery directive criterions.
December 2011
NA EHS Liaison Report

15. Committee Activities Subcommittees & Task Forces [2/3]
SC / TF
Updates
S2 Ladders & Steps TF
Rework ballot 4449C-LI1 (work at elevated locations).
NA committee “straw poll” suggested in favor of changing direction to mainly informative rather than normative.
S2 Non-ionizing Radiation TF
New SNARF 5357 to continue TF work.
To revise the optical radiation criteria to align with the changes in the external referenced standards.
S6 Revision TF
Continuing to develop line item revisions to S6.
S25 TF
Ballot 5171 for C1-12
§ and ¶ Symbol WG
Continuing investigation on the proper use of section and paragraph symbols in S2.
December 2011
NA EHS Liaison Report

16. Committee Activities Subcommittees & Task Forces [3/3]
Manufacturing Equipment Safety Subcommittee (MESSC)
From NA Fall meetings: “NA EHS TC adopts a preference that S8 be a delayed revision document synchronized with S2.”
S13 Support TF
From NA Fall meetings: “NA EHS TC recommends to the S13 TF that RIs 2-8 in S13 be deleted because we cannot indicate in S13 whether the information is current or not in the RIs and so people would have to check the source documents anyway.”
December 2011
NA EHS Liaison Report

17. NA Standards Spring 2012 Meetings
April 2-5
SEMI Headquarters in San Jose, California
Inviting local companies willing and able to host some of the meetings to maintain one-week format
Final schedule, including meeting/hosting locations, to be announced soon
December 2011
NA EHS Liaison Report

18. NA Standards Spring 2012 Meetings April 2-5
Sunday
Monday
Tuesday
Wednesday
Thursday
Friday
Saturday 1 2 3 4 5 6 7
NARSC
EH&S
Facilities & Gases
Liquid Chemicals
Information & Control
MEMS/NEMS
HB-LED
Schedule -at-a-glance
Metrics
PV Materials
Physical Interfaces & Carriers
Silicon Wafer
Traceability
ATE
3DS-IC
December 2011
NA EHS Liaison Report

19. NA Standards Staff Changes
Paul Trio
Sr. Manager, NA Standards Operations
Operations
Committees: NARSC / I&C / ATE / MEMS / Microlithography, HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Kevin Nguyen
Manager, NA Standards Committees
Committees: Facilities / Gases / PV / PV Automation / PV Materials / Silicon Wafer / Traceability
Standards Website
Provisional: Contact Paul Trio or Kevin Nguyen
Committees: Compounds Semiconductor Materials / EHS / FPD / Liquid Chemicals / Metrics / PIC
Hiring of new NA Standards staff has been completed. Official announcement by the end of the month.
December 2011
NA EHS Liaison Report

20. Thank You!
For more information or participate in any NA EHS activities, please contact Paul Trio at SEMI
December 2011
NA EHS Liaison Report