1. Information & Control Committee Japan Liaison Report
Rev 0.2
April 4, 2012
To: North America Information & Control Committee

2. Outline Leadership and Structure Change Committee Leadership
Current Committee Structure
Document Review Summary
Approved SNARFs
Technical Ballots to be reviewed
Task Force Update
Meeting Information

3. Leadership and Structure Change
Vice Chair
Takehiko Ishikawa (TEL) stepped down as Japan I&C Committee Vice Chair. 3

4. Committee Leadership Technical Architect Committee Co-chairs Advisor
Takayuki Nishimura / DNS
Mitsuhiro Matsuda / Hitachi Kokusai Electric
Advisor
Mitch Sakamoto / TEL
Technical Architect
Hiroshi Kondo / Muratec Automation
Tadashi Mochizuki / TEL
Technical Editor
TBA 4 4

5. Current Committee Structure
Advisor
M. Sakamoto (TEL)
JRSC
Technical Architect
H. Kondo (Muratec Automation)
T. Mochizuki(TEL)
I&C Committee
T. Nishimura (DNS)
M. Matsuda (Hitachi Kokusai)
Technical Editor
TBA
各々の説明を入れる
SEMICON/J の委員会で ・・・ これらのTFは活動がないので解散することにしました。
AMHS SEM TF
H. Kondo (Muratec Automation)
M. Ago
(Daifuku)
GEM 300 TF
T. Mochizuki (TEL)
M. Matsuda
(Hitachi Kokusai)
Equipment Information System Security (EISS) TF
M. Sakamoto (TEL)
Sensor Bus TF
H. Ogihara (MKS Japan)
New!
New! 5

6. Document Review Summary [1/2]
* Cycle 7, 2011 *
Doc #
Description
TC Action
5194
(4 LIs)
Revisions to:
Line Item Revisions to SEMI E5-0611E, SEMI Equipment Communications Standard 2 Message Content (SECS-II). Correcting some errors.
LI1: Correct a mismatch about ALCD’s alarm set/clear usage.
LI2: Correct Message Detail of “S3,F21 Port Group Definition”.
LI3: Correct reference error between “Message Detail“ and “Data Item Dictionary”
LI4: Clarify usage of “S2,F37 Enable/Disable Event Report (EDER)”.
1: Passed as balloted.
2: Passed as balloted.
3: Passed as balloted.
4: Passed as balloted.

7. Document Review Summary [2/2]
* Cycle 7, 2011 *
Doc #
Description
TC Action
5227
Reapproval of SEMI E , Specification for Interbay/Intrabay AMHS SEM (IBSEM)
Superclean
5228
Reapproval of SEMI E , Specification for AMHS Storage SEM (Stocker SEM)

8. Approved SNARFs at Japan Standards Meetings in conjunction with SEMICON Japan 2011
Sensor Bus TF
Revision to SEMI E (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK
5369
I&C Committee
Reapproval of SEMI E E Specification for Wafer ID Reader Communication Interface ― The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards
5368
GEM300 TF
Line item revision to E , SPECIFICATION FOR CARRIER MANAGEMENT (CMS). Load Port Transfer Error Indication.
5367 TC
Description
Doc #

9. Technical Ballots to be reviewed at Japan Standards Spring 2012 Meetings
* Voting Period – Cycle 2 *
Document #
Document Title TF
5368
Reapproval of SEMI E E Specification for Wafer ID Reader Communication Interface ― The Wafer ID Reader Functional Standard: Concepts, Behavior and Service and SEMI E Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards
I&C Committee
5369
Revision to SEMI E (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK
Sensor Bus TF

10. Task Force Updates [1/4]
Equipment Information System Security (EISS) Task Force
New task force
Charter
This task force will develop and propose standards that define concept and required capabilities to maintain security of information system on semiconductor manufacturing equipment.
Scope
Develop standards for controllers of semiconductor manufacturing equipment such as process equipment, metrology equipment, material transfer equipment and so on.
The standard will define;
Common perception of security problems induced by malware or illegal access.
Concept for protection against those security problems.
Guide for required capabilities for the protection.
SNARF to be proposed at Japan Spring Meeting on April 19
Guide for Equipment Information System Security

11. Task Force Updates [2/4] Sensor Bus Task Force New task force Charter
We need to maintain existing Sensor Actuator standards originally proposed by Japan region, and also need to discuss related issues about Sensor Actuator Bus standard to get along with NA Sensor Bus TF.
Scope
Maintenance of existing E54 sub-documents
Talking newly required or possibility to revise Sensor Actuator Bus issues.
Ballot #5368 submitted to Cycle 2-12 and to be reviewed at Japan Spring Meeting on April 19
Revision to SEMI E (Reapproved 1211) Specification of Sensor/Actuator Network for A-LINK
Appending the ¶ 9.5 Vacuum Pump (VPD) to § 9 Specific Device Model Mappings.

12. Task Force Updates [3/4] GEM 300 TF
Working on #5367 “Line item revision to E , Specification for Carrier Management (CMS). Load Port Transfer Error Indication.”
To issue Informational Ballot.
To discuss the issues from AMHS TF (problems when AMHS deliver a carrier and internal buffer equipment execute CarrierOut.)
SNARF to be proposed at Japan Spring Meeting on April 19
In E40.1, Mapping of RecID
Current mapping is only RCPSPEC
PPID to be added to this mapping

13. Task Force Updates [4/4] AMHS TF I&C Committee
None.
I&C Committee
Ballot #5369 submitted to Cycle 2-12 and to be reviewed at Japan Spring Meeting on April 19
Reapproval Ballot of E118 and E118.1 for Cycle
SEMI E E – Specification for Wafer ID Reader Communication Interface – The Wafer ID Reader Functional Standard: Concepts, Behavior and Service
SEMI E – Specification for SECS-I and SECS-II Protocol for Wafer ID Reader Communication Interface Standards 13

14. Meeting Information - Japan
Last Meeting
Japan 2011 Winter Meeting in conjunction with SEMICON Japan
December 9, :00-17:00
@ Makuhari Messe, Chiba, Japan
Next Meeting
Japan 2012 Spring Meeting
April 19, :00-17:30
@ SEMI Japan Office, Tokyo, Japan
Yearly schedule of Japan I&CC meeting
June, September and December 7 (tentative) 14

15. Japan I&CC Liaison Report
End of
Japan I&CC Liaison Report
Thank You 15