1. Plasma Chamber Spectrographic Data Acquisition and Archival
SFR Workshop
November 8, 2000
Timothy D. Duncan, Costas Spanos
Berkeley, CA
2001 GOAL: To Provide a growing data archive for ongoing research.
11/8/2000

2. Motivation OEM Rainbow Plasma Chamber has few metrology sensors.
More metrics are needed to better predict effects of recipe parameters on overall wafer processes.
Cost of many individualized experiments is prohibitive.
Looks forward to APC using feed-forward and feedback control loops.
11/8/2000

3. The Metrology Equipment Installed
PC System
SECS Port Cable
ZScan Port Cable
Fiber-Optic
Optical Lens
ZScan Sensor
11/8/2000

4. Labview Interface
11/8/2000

5. Archival System N E T W O R K Database Registry Database Store
Data Gathering
Process
Data Gathering
Process
Database
Store
Data Gathering
Process
Data Gathering
Process
Archive User Interface
(GUI)
Archive User Interface
(GUI)
Archive User Interface
(GUI)
Archive User Interface
(GUI)
Data Gathering
Process
Data Gathering
Process
Data Gathering
Process
Data Gathering
Process
11/8/2000

6. Archive Interface
11/8/2000

7. System Block Diagram N E T W O R K Data PC Archiving LAM5 Rainbow
Advanced Energy
ZScan
RF Data Capture
Data
Archiving
System PC
Data Capture
Processes
LAM5 Rainbow
Plasma Etcher
SECS
Ocean-Optics
Spectroscopic
Data Capture
11/8/2000

8. Provide real-time Advanced Processing Control.
AEC/APC Future Goals
Provide real-time Advanced Processing Control.
Extend the functionality by providing custom run definitions for designed experiments.
Provide advanced alarm function reporting utilizing database archive.
11/8/2000

9. Integrate the system into the networked lab AEC/APC system.
2002 and 2003 Integration Goals
Integrate the system into the networked lab AEC/APC system.
Provide feedback and feed forward control at factory level of automation.
Provide online browsing of advanced alarm reporting of archived database.
11/8/2000