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Laboratory: A Typical Evaporation Process
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- Open evaporator.
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- Remove wafer holder.
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- This is where the wafers will be during the evaporation process.
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- Remove the bell jar.
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- Prepare metal: e. g., use metal wire.
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- The metal will be placed in a "basket".
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- Some evaporators use a "coil" instead of a "basket".
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- Both metal and basket/coil should be cleaned.
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- They should then be dried in the dehydration oven.
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- The basket/coil should be installed between the two electrodes,
and the metal placed inside the basket or around the coil.
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- Move shutter to cover the filament.
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- Put on the bell jar.
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- Carefully load the wafers onto the wafer holder.
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- One of the wafers may be a "test" wafer for measuring the metal layer thickness.
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- Replace the wafer holder back on top of the bell jar.
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- Place the cover back onto the bell jar.
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- Lower pressure ( ~ 10-6 Torr ).
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- Heat the filament to evaporate the metal.
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- Cool and remove wafers.
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- The test wafer allows measurement of film thickness.
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