1. Design and Calibration of an Optical Micro Motion
Sensing System for Micromanipulation Tasks
Tun Latt Win, U-Xuan Tan, Shee Cheng Yap and Wei Tech Ang
School of Mechanical and Aerospace
Engineering, Nanyang Technological University, Singapore
Position Sensitive Detectors (PSD) are used as sensing devices.
Neural network calibration is performed to eliminate nonlinearity of PSDs and lenses.
After calibration, percentage RMS error and noise are about 0.16% and 0.7 micrometer respectively. The sampling rate of the system is 250 Hz.
The system can be used as an evaluation tool in micromanipulation tasks
Micro Motion Sensing System