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8. Our probes tips are made of tungsten carbide. The bevel edge line represents the transition between the top surface and the beveled surface. We always start the scan on the top surface and run down into the silicon. We deliberately probe a few points on the original surface so that we are sure we do not miss any data at the start of the bevel. When we reduce the profile, the data points on the top surface are discarded.
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35. Some samples need two bevels.
WHY is that?
A shallow bevel angle to detail the shallow structures at the surface and a steep bevel to reach the maximum depth of interest.
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36. Some samples need two bevels.
Can’t you just use a smaller step and detail the surface?
Two microns (horizontal displacement) is about the smallest step we can make without stepping into the damage crater of the previous measurement.
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37. Some samples need two bevels.
Can’t you just produce a real long bevel?
The longer the bevel, the more risk of scratches. We would prefer keeping the bevel length under a 1000um but we will make it longer if necessary – again with the risk of unacceptable scratches.
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38. The following is a case of a bipolar structure that needed two bevels
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42. Auto-Doping Problems during EPI Deposition
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