1. PURE Mid-Semester Project Report
Mark Kraman
Qingyi Wang
Wen Huang’s Research Group

2. General Ambition of the Research
Develop Self-Rolled Up Membrane Nanotubes
Passive RFIC applications
Inductors, Capacitors, Transformers
Use the slap bracelet analogy to explain how this 3D structure is fabricated using an ingenious 2D method
Explain the broad goal of Wen’s research
Briefly introduce my personal place within the research group

3. Specific Goals to Accomplish
Reduce pinhole count in SiNx layer
Integrate inductor core by deposition of ferromagnetic permalloy (Ni/ Fe/ Mo/ Mn)
Integrate graphene contact pads
Explain in depth the specific tasks I am to accomplish, explaining the purpose of each tasks within the greater goal of the research of my mentor

4. Progress to Date Gain access to MNTL and MRL tools Preliminary Trials
For all processes in nanofabrication
Lithography
Deposition
Etching
Preliminary Trials
Follow group members to learn processes
Work through process to create inductors

5. Cu Thin Film Resistivity vs. Nano-morphology
Goals
Increase the conductivity of Cu Thin Film
--Reduce the energy loss
--Speed up the transmission of signals

6. Progress Gaining Accesses to MNTL Cleanroom and MRL
Gaining Accesses to Deposition Machines
Thermal Deposition (Cooke)
E-beam Evaporator
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7. Understanding the properties of Cu thin film
Pure Copper
Thickness
Deposition pressure
Deposition rate
Composite Copper
Multiple Metal layers(CuI thin films)
Doping(Partial Oxidation)