1. Status of AAO 33mm plates at ANL
Seon W. Lee† and H. Hau Wang‡
High Energy Physics Division †, Materials Science Division ‡
Argonne National Laboratory
Friday, June 11, 2010
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2. Contents
Both 20um pore and 10 um pore testable MCP are getting ready during this week.
For each different pore size, multiple samples are prepared
5um pore testable MCPs are under preparation
Photomask with 5um pores pattern has been ordered recently
Currently we are preparing both 20um pore and 10um pore testable AAO MCPs.
They are getting ready during this week.
For each different pore size, multiple samples are prepared since we need a pair MCPs for test measurement.
We are planning to make 5um pore AAO MCP. However, laser writer at CNM cannot write 5um size pattern.
So we designed and ordered photomask with 5um pore, we will get it soon.
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3. 20um pore 33mm AAO MCP with Funnel shape on one side
Front and back side
This is SEM image for 20um pore 33mm AAO MCP. Left side of picture is front side and right side pictures are back side.
One side 20um pore pattern, and the other side we have funnel like shape.
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4. 10um pore AAO MCP Aspect Ratio : 20
This is 10 um pore AAO MCP. Front and back side looks same.
Aspect Ratio : 20
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5. 5um pore photomask Magnify
This is layout for 5um pore photomask. We expect we will get this in a few days.
Then we will be able to fabricate AAO MCP with smaller pore size and higher aspect ratio.
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6. Plans in near future
Both 20um pore and 10 um pore testable MCP will be given to ALD group next week
For each different pore size, multiple samples are prepared
5um pore with higher aspect ratio testable MCPs will be fabricated.
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